Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Applied Materials (AMAT) Producer S PECVD TEOS

Asset ID: 209711

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Applied Materials (AMAT)

Producer S PECVD TEOS

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2001

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

Need use the destructive methods to deinstallation the equipment.

The equipment missing many parts.

Model:PRODUCERIII

​The system not On-Line

All Cables not present

Mainframe Type is Producer,S

System Configuration

Position A is TEOSPE

Position B is TEOSPE

Position C is TEOSPE

Directory of Process Types is PE TEOS

Front-End Interface is 2 LPs 

Loadlocks is Single 

No Blocker

No Liner

No RF Generator 1

No Heater

No Pedestal

Slit Valve

No Filter

Foreline

No Foreline Throttle Valve

No Foreline ISO Valve

No NDIR Endpoint Detector

No Gas Box

No Dome

No Baffle

No Faceplate

No Blocker (gas feed block)

No Pumping Liner

No C-Channel

No Spacer

No Liner Ceramic Top

No Liner Ceramic Middle

No Liner Ceramic Bottom (edge ring)

No Bottom Liner

No Ceramic Isolator

No Lift Pins, Floating

No Lift Hoop

No RPS

No Ozone Controller Configuration

Liquid Delivery Type is PLIS

DTLR Availability is TEOS and TEPO

Gas Line #1 N20

Gas Line #2 N2

Gas Line #3 He

Gas Line #4 SiF4

Gas Line #5 NF3

Gas Line #6 Ar

Gas Line #7 N2

Gas Line #8 O2

Gas Line #9 TEPO

Gas Line #10 TEOS

Gas Line #11 N2

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Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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