Applied Materials (AMAT) Producer GT Eterna FCVD

Vendor Chm Model

Chemicals / Gases Used

Chm/Unit Position   1

ETERNA FCVD Twin

N2,NF3,Ar,O2,TSA,He,NH3,H2O

Chm/Unit Position   2

NanoCure UV Twin

N2,NF3,Ar,O3Ar

Chm/Unit Position   3

ETERNA FCVD Twin

N2,NF3,Ar,O2,TSA,He,NH3,H2O

Chm/Unit Position ___

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Refer to ADCS to extract the Doc 2 to update the Tool/System Configuration accordingly. 

(Tool owners require to ensure the physical tool configuration tally to what is listed)

System Configuration

Description:

Process Unit:

Model:

Remark

Controller:

N/A

MFC/Pressure Unit:

STEC（Z700series）

Drive Mechanisms:

N/A

FOUP Opener:

Sinfonia

Gas System:

N/A

Exhuast System:

N/A