Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
PECVD (Chemical Vapor Deposition)
Date of Manufacture: 2015
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tool has been de-installed and is stored in an off-site warehouse.
CONFIGURATION & PHOTOS AVAILABLE. For further details of the configuration, please ask your sales person.
Missing or damaged parts: Not reported. Please inspect to confirm.
| Vendor Chm Model | Chemicals / Gases Used (not to use Micron Proprietary names) | ||||
| Chm/Unit Position 1 | ETERNA FCVD Twin | N2,NF3,Ar,O2,TSA,He,NH3,H2O | |||
| Chm/Unit Position 2 | NanoCure UV Twin | N2,NF3,Ar,O3Ar | |||
| Chm/Unit Position 3 | ETERNA FCVD Twin | N2,NF3,Ar,O2,TSA,He,NH3,H2O | |||
| Chm/Unit Position ___ | _______________________ | __________________________________ | |||
| Chm/Unit Position ___ | _______________________ | __________________________________ | |||
| Chm/Unit Position ___ | _______________________ | __________________________________ | |||
| Chm/Unit Position ___ | _______________________ | __________________________________ | |||
| Refer to ADCS to extract the Doc 2 to update the Tool/System Configuration accordingly. | |||||
| (Tool owners require to ensure the physical tool configuration tally to what is listed) | |||||
| System Configuration | |||||
| Description | |||||
| Tool: | |||||
| Process Unit: | Model: | Remark | |||
| Controller: | N/A | ||||
| MFC/Pressure Unit: | STEC（Z700series） | ||||
| Drive Mechanisms: | N/A | ||||
| FOUP Opener: | Sinfonia | ||||
| Gas System: | N/A | ||||
| Exhuast System: | N/A | ||||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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