Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taichung City, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
OEM:EBRA
Tool Model:F-REX300S2
Loading Configuration:4 loadports
Chamber Name 1:PolisherA
Chamber Name 2:PolisherB
Chamber Name 3:PolisherC
Chamber Name 4:PolisherD
Chamber Name 5:Cleaner1
Chamber Name 6:Cleaner2
Chamber Name 7:Cleaner3
Chamber Name 8:S/D
Chamber 1 Description:Polishing Unit
Chamber 2 Description:Polishing Unit
Chamber 3 Description:Polishing Unit
Chamber 4 Description:Polishing Unit
Chamber 5 Description:Roll Brush Unit
Chamber 6 Description:Roll Brush Unit
Chamber 7 Description:2FJ Unit
Chamber 8 Description:Dryer Unit
Chamber 1 Chemicals Gases Used:DIW
Chamber 2 Chemicals Gases Used:DIW
Chamber 3 Chemicals Gases Used:PL5111/PL6508
Chamber 4 Chemicals Gases Used:DIW
Chamber 5 Chemicals Gases Used:NH4OH
Chamber 6 Chemicals Gases Used:DHF(0.5%)
Chamber 7 Chemicals Gases Used:NH4OH
Chamber 8 Chemicals Gases Used:DIW
N2 Load Port Exists 1:No
N2 Load Port Exists 2:No
N2 Load Port Exists 3:No
N2 Load Port Exists 4:No
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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