Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Tainan 744, Taiwan
Available date: Currently Available
Inspect to confirm configuration and condition.
The tool is running .
Install date : 2013/08/20
Last PM date : 2015/07/22
System SW(OS) version is Win 7
System SW(App) version is Release 1.5 Patch 11
All the cables are present
Wafer Handler :
Handler Type is Brooks and Cassette/FOUP Loaders are two
Robot Type is Brooks and include the Pre-Aligner
Communication Interface is GEM HosT 5050
Supporting Equipment :
Power Supply is 208V single phase(3write), 57~63hz, 13.5~15A
Backing Pump is Edward-IH80*2ea
Facility Requirements :
CDA : 6~7bar
Vacuum : Lower than 200mbar absolute 18splm
Gas : Ar 90% +/-1%
Power : 208V single phase(3write), 57~63hz, 13.5~15A
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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