Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Tokyo Electron Ltd. (TEL) Unity Me 85 SCCM

Asset ID: 209783

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Tokyo Electron Ltd. (TEL)

Unity Me 85 SCCM

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2003

Currently Configured for: 200mm

Current Equipment Status: Available

Location of Equipment: Hsinchu, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

Process:Cu Metal trench/via etch

1. SiO2 ETCH

2. Si3N4 ETCH

The system can produce wafers as-is.

OEM and 3rd Party audit are available.

Handler Type is LPT 2200

Robot Type is ROBOT..DBR930899-A ROBOT M5 (SCCM ROBOT)

End-Effecter Type is XFR SYS BR940209 8" FORK U-2

Pre-Aligner is include.

System SW (OS) version is UNITY-ECC ver 2.35-Rev403-GEM-5.56c

Power Supply / AC Dist Box / UPS are include.

Facility Requirements:​ CDA / DIW / Vacuum / Gas / Power

The Fork / SMIF / Chiller / pump of this equipment has been lost.


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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