Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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WCVD (Chemical Vapor Deposition)
Date of Manufacture: 2004
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool Model: C3-SCON
System Power Rating: 208 AC 3-Phase
Loading Configuration: 3 load ports
Chamber lift pin Servo moter assembly Qty 2- Retrofit to servo moter from Pneumatic
Process Unit:4200-61 VIA W DEP
Chm/Unit Position 1: C3 ALTUS CHA; Chemicals / Gases Used: Ar/SiH4/H2/WF6/NF3/B2H6/N2
Chm/Unit Position 2: C3 ALTUS CHB; Chemicals / Gases Used: Ar/SiH4/H2/WF6/NF3/B2H6/N2
Basic System
Platform type: C3 WTS MC3
Chamber type: C3 ALTUS
Loadport count: 3
Required Software Revisions
System software (Proteus): 2.657_151
System software (QNX): 5.86B150
WTS IOC0 firmware: SIOC 4.8
WTS IOC1 firmware: SIOC 4.8
WTS IOC E84/AWC firmware: NA
Altus IOC0 & IOC1 firmware: 02-274618-00 SIOC 4.8
Altus IOC2 firmware: 02-274618-00 SIOC 4.8
Windows version: Windows 2000
ATM robot firmware: WAVE2, 1.0T,CF2AB
Throttle valve controller firmware: NA
Supporting Remote Units
Transfer module pump: IH600
Loadlock pump: IH600
Hardware Configuration - Frame
Module controller: ASSY,CONTROLLER,MC4,ETHERNET, 02-423402-00
Platform controller: ASSY,CONTROLLER,MC4,ETHERNET, 02-423402-00
WTS IOC0: PCA,FIELD,WTS-3F,SIOC0, 03-157052-00
WTS IOC1: ASSY,PCA,FIELD SIOC1 WTS-3F, 03-144747-00
WTS IOC E84/AWC: NA
Altus IOC0 & IOC1: ASSY,PCA,FLD CONN,SIOC 0&1,300, 02-057949-00
Altus IOC2: ASSY,PCA,FLD CONN,SIOC2,300WCV, 02-109139-00
ATM robot kit: 63-283529-00
ATM robot end effector: 02-270536-01
Transfer module robot: 02-262511-00
Transfer module SMC valve: 60-251903-00
Cooling pedestals, LL-R: 02-164380-01 Right
Cooling pedestals, LL-L: 02-164380-02 Left
Throttle valve, WTS: 02-101445-00
LL ATM gate valve: 02-259468-00
LL vacuum gate valve: 60-052581-00
Leak check shutoff valve: 04-110786-00
Mini-environment AWC: Installed
TM AWC sensor transmitter: 27-053299-00
TM AWC sensor receiver: 27-053301-00
IMM-ready hardware: NA
Loadlock baratron: 27-126439-00
Transfer module baratron: 27-10340-00
Transfer module pump: IH600
Loadlock pump: IH600
He elimination loadlock: NA
FFU filter: PB-500 FFU Grade for HF (Novellus) Size, 002346-0002, 22-S4C22-1
FFU filter lifetime, chemicals of interest, limit: 3 months, NOX, < 6 ppb
Hardware Configuration - Chamber
Station 1 pedestal: 16-341152-00
Station 1 MOER: 15-105508-00
Station 1 showerhead: 16-289070-00
Station 2 pedestal: 16-341152-00
Station 2 MOER: 15-105508-00
Station 2 showerhead: 16-289070-00
Station 3 pedestal: 16-341152-00
Station 3 MOER: 15-105508-00
Station 3 showerhead: 16-289070-00
Station 4 pedestal: 16-341152-00
Station 4 MOER: 15-105508-00
Station 4 showerhead: 16-289070-00
Remote plasma clean: 27-261291-00
Indexer plate hub: 15-100082-00
Indexer plate upper assembly: 15-046309-00
Spindle assembly: 02-324753-00
IR endpoint detector kit: 34-348116-00
Leak check shutoff valve: 60-268274-00
Assembly, carrier ring holder (reduced tip wafer holder): 02-332440-00
Throttle valve PCV: 60-174047-00
TV controller/firmware: 27-146103-00
Gate valve, L-motion SMC: 60-313773-00
Symmetric foreline: 04-363404-00
Process 100T manometer: 27-10340-00
Process 10T manometer: 27-10343-00
Backside 100T manometer: 27-10340-00
SiH4/B2H6 canopy filter: 22-00006-00
Aligner: NA
UPC: 02-162343-00
Station 1 springs: 15-355501-00
Gas Panel (part#, gas species, size):
Line 1, manifold D: AERA FC-D980, Ar, 5SLM
Line 2, manifold D: Aera FC-D980C-SiH4 / 500 SCCM
Line 3, manifold A: AERA FC-D980,H2, 30slm
Line 4, manifold A: AERA FC-D980, Ar, 20slm
Line 5, manifold W: Aera FC-D980C-WF6 / 500 SCCM
Line 6: na
Line 7:
Line 8, manifold C: AERA FC-D980, Ar, 20SLM
Line 9, manifold C: AERA FC-D980, H2, 30SLM
Line A: NA
Line B, manifold A: NA
Line C, Ar carrier: AERA FC-D980, Ar, 20SLM
Line D, manifold H: AERA FC-D980, Ar, 50SLM
Line E, manifold J: Aera FC-D980C-WF6 / 500 SCCM
Line F, manifold K: AERA FC-D980, Ar, 5SLM
Line G, manifold K: Aera FC-D980C-SiH4 / 500 SCCM
Line H: NA
Line I, manifold A: AERA FC-D980, NF3, 5SLM
Line J, manifold M: Aera FC-D980C-WF6 / 500 SCCM
Line K, manifold N: Aera FC-D980C-WF6 / 500 SCCM
Line L: NA
Line M, Ar carrier: AERA FC-D980, Ar, 20SLM
Line N, manifold D: AERA PA7800, B2H6, 750SCCM
Line P, manifold F: AERA FC-D980, Ar, 20SLM
Line X, manifold K: NA
Damage/Missing parts list
Please inspect tool to reconfirm
Pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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