Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process: ALDSIOX
Furnace Unit:
Cartridge Heater - D7EX40096 - Part Qty1 - TUF-CE-L
Thyristor Unit for Control - SKKT160L5Z4F-HKD - Part Qty1 - Air cooling type
Clean Unit:
Clean Module Unit - BV-R14TF2G1H - Part Qty1 - Wafer transfer area(Transfer)
Clean Module Unit - BV-R09TF2G1L - Part Qty1 - Wafer transfer area(Loading Area)
Controller:
Main Controller(OU) - D4EX38403(KDSC-2007CONT) - Part Qty1
Main Operation Unit - TM150-HKT05 - Part Qty1
Sub Operation Unit - D4EX40577 - Part Qty1
Process Module Controller - D4EX43195(PMC5000) - Part Qty1
DDC Temperature Controller - D4EX37566(CQ1720-EA) - Part Qty1 - CPU +TC Unit
Gate Drive Unit - D4EX36969(DN-150VR-T5) - Part Qty1
MFC / Pressure Unit - D4EX36215(MFCDNET2) - Part Qty1 - DeviceNet Remote
FOUP Loader Controller Unit - D4EX43172(ROBO5000) - Part Qty1 - Main Unit
Valve / Interlock Control Unit - CJ1G-CPU43H - Part Qty1
Signal Tower (Front) - LME-402W-RBYG - Part Qty1 - Red, Blue, Yellow, Gree
Gas Flow Pattern Panel - V815IXD-U102 - Part Qty2 - ※1
EDA Controller - D4EX38401 (EDA) - Part Qty1 - ※1
Drive Mechanisms:
I/O Shutter - D5CX42765 - Part Qty1
FOUP Stage - D5CX42946 - Part Qty1
Rotation FOUP Storage - D5CX42938 - Part Qty1 - FOUP receipt number : 16
FOUP Opener - D5CX42562 - Part Qty1 - 2 Ports
Wafer Transfer - D5CX42124 - Part Qty1
Variable Wafer Pitch Converter - (D5CX42124) - Part Qty1
Boat Elevator - D5CX41742 - Part Qty1
Furnace Port Shutter - D5CP73285 - Part Qty1
Boat Rotation - D5CP56443 - Part Qty1
Broken Wafer Detector - (D5CX42124) - Part Qty1
Wafer Transfer Crash Detector - (D5CX42124) - Part Qty1
Boat Changer - D5CP68312 - Part Qty1
Gas System:
Gas Unit(IGS) - D7VX44897 - Part Qty1 - Stick Type N2, O2, GAS-1
Tape Heater for gas pipe - ----- - Part Qty1set - Si Precursor, H2O, Catalyst,
Bubbler Unit - RVG600W - Part Qty3 -
Canister - BK1200URM - Part Qty3 -
Vapor Controller - VC-1420,,SEF-8240D - Part Qty1
Plasma System:
RF Plasma Generator - TX06-9001-00 - Part Qty1 - Made by ADTEC
Matching Controller - AMVG-RCM1-AA - Part Qty1 - Made by ADTEC
Matching Unit - AMVG-1000-AA - Part Qty1 - Made by ADTEC
Missing/Damaged Parts List:
Please inspect tool to reconfirm
PRESSURE SENSOR (PSW13) 810-17697- missing Qty 1
BARATRON SENSOR(VG11)- missing Qty 1
BARATRON SENSOR(VG13) 810-129268- missing Qty 1
BARATRON SENSOR(VG12) 810-119290- missing Qty 1
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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