Kokusai Quixace Ultimate ALD SiO2

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: ALDSIOX

Furnace Unit: 

Cartridge Heater - D7EX40096 - Part Qty1 - TUF-CE-L

Thyristor Unit for Control - SKKT160L5Z4F-HKD - Part Qty1 - Air cooling type

Clean Unit: 

Clean Module Unit - BV-R14TF2G1H - Part Qty1 - Wafer transfer area(Transfer)

Clean Module Unit - BV-R09TF2G1L - Part Qty1 - Wafer transfer area(Loading Area)

Controller: 

Main Controller（OU） - D4EX38403(KDSC-2007CONT) - Part Qty1

Main Operation Unit - TM150-HKT05 - Part Qty1

Sub Operation Unit - D4EX40577 - Part Qty1

Process Module Controller - D4EX43195(PMC5000) - Part Qty1

DDC Temperature Controller - D4EX37566(CQ1720-EA) - Part Qty1 - CPU +TC Unit

Gate Drive Unit - D4EX36969(DN-150VR-T5) - Part Qty1

MFC / Pressure Unit - D4EX36215(MFCDNET2) - Part Qty1 - DeviceNet Remote

FOUP Loader Controller Unit - D4EX43172(ROBO5000) - Part Qty1 - Main Unit

Valve / Interlock Control Unit - CJ1G-CPU43H - Part Qty1

Signal Tower (Front) - LME-402W-RBYG - Part Qty1 - Red, Blue, Yellow, Gree

Gas Flow Pattern Panel - V815IXD-U102 - Part Qty2 - ※1

EDA Controller - D4EX38401 (EDA) - Part Qty1 - ※1

Drive Mechanisms: 

I/O Shutter - D5CX42765 - Part Qty1

FOUP Stage - D5CX42946 - Part Qty1

Rotation FOUP Storage - D5CX42938 - Part Qty1 - FOUP receipt number : 16

FOUP Opener - D5CX42562 - Part Qty1 - 2 Ports

Wafer Transfer - D5CX42124 - Part Qty1

Variable Wafer Pitch Converter - (D5CX42124) - Part Qty1

Boat Elevator - D5CX41742 - Part Qty1

Furnace Port Shutter - D5CP73285 - Part Qty1

Boat Rotation - D5CP56443 - Part Qty1

Broken Wafer Detector - (D5CX42124) - Part Qty1

Wafer Transfer Crash Detector - (D5CX42124) - Part Qty1

Boat Changer - D5CP68312 - Part Qty1

Gas System: 

Gas Unit(IGS) - D7VX44897 - Part Qty1 - Stick Type N2, O2, GAS-1

Tape Heater for gas pipe - ----- - Part Qty1set - Si Precursor, H2O, Catalyst,

Bubbler Unit - RVG600W - Part Qty3 -

Canister - BK1200URM - Part Qty3 -

Vapor Controller - VC-1420,,SEF-8240D - Part Qty1

Plasma System: 

RF Plasma Generator - TX06-9001-00 - Part Qty1 - Made by ADTEC

Matching Controller - AMVG-RCM1-AA - Part Qty1 - Made by ADTEC

Matching Unit - AMVG-1000-AA - Part Qty1 - Made by ADTEC

Missing/Damaged Parts List:

Please inspect tool to reconfirm

PRESSURE SENSOR (PSW13)   810-17697- missing Qty 1

BARATRON SENSOR(VG11)- missing Qty 1   

BARATRON SENSOR(VG13)   810-129268- missing Qty 1

BARATRON SENSOR(VG12)   810-119290- missing Qty 1