Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Kokusai Electric Co., Ltd Quixace II Nitride

Asset ID: 208416

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Kokusai Electric Co., Ltd

Quixace II Nitride

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 12/11/2021

DIFFUSION 11-3HIKE_Q2LN_NIT_01PAD HIKE QUIXACE2 NITR


Process: NITR


Tool config is based on original PO, please verify tool details at tool inspection


Furnace Unit

Cartridge Heater:D4EX30445-RHC-2 

T/C for Heater Control:D4EX15442

T/C for Sub Heater Control:D4EX30655

T/C for Over temperature Protection:D4EX15442

5-P T/C for Cascade Control:D4EX22994-L Type

5-P T/C for Profile Control:OPTION

1-P T/C for Profile Control:D4EX21001-OPTION 


Clean Unit

Clean Module Unit:BV-R14TF2G1H-Wafer transfer area(Transfer)

Clean Module Unit:BV-R09TF2G1L-Wafer transfer area(Loading Area)

Clean Module Unit:PCF-8EKD3796-Rotation FOUP Storage(Lower)


Controller

Main Controller(OU):D4EX35757(CX5000)

Main Operation Unit:TM150-HKT02

Sub Operation Unit:KDSC-2005SUBDISP

Process Module Controller:D4EX43195(PMC5000)

DDC Temperature Controller:D4EX36151(CQ1720)-CPU +TC Unit

Gate Drive Unit:D4EX36969(DN-150VR-T5)

MFC / Pressure Unit:D4EX36215(MFCDNET2)-DeviceNet Remote

FOUP Loader Controller Unit:D4EX36773(Robo5000)-Main Unit

Wafer Handling Controller Unit:D4EX36758(Robo5000)-Sub Unit

Valve / Interlock Control Unit CJ1G-CPU43H-Made by Omron

Switching HUB:FL SWITCH SFN 8TX

Signal Tower (Front):LME-402W-RBYG,Red, Blue, Yellow, Green

Signal Tower (Rear)

Signal Tower (Pump)

Gas Flow Pattern Panel:D7EX40367

EDA Controller:D4EX38401 (EDA)

EDA Operation Unit:TM150-HKT02


Drive Mechanisms

I/O Shutter

AGV/PGV/OHT Stage

FOUP Loader

Rotation FOUP Storage: FOUP receipt number : 16

FOUP Opener:2 Ports

Wafer Detection:25 in one lot.

Wafer Transfer:Lift Transfer

Variable Wafer Pitch Converter

Boat Elevator

Boat Changer

Furnace Port Shutter

Boat Rotation

Broken Wafer Detector:OPTION

Wafer Transfer Crash Detector:OPTION

Tweezer Pitch check mechanism:OPTION


Gas System

Gas Unit(IGS):SiH2Cl2, NH3, NF3

Tape Heater for gas pipe:SiH2Cl2 Line


Exhaust System

Dry Pump& Mechanical Booster Pump:IH1800-HTX-Made by EDWARDS/Prepared By User

Diaphragm Sensor (1000Torr):631C13T8FH,Made by MKS

Diaphragm Sensor (2Torr):631C02T8FH,Made by MKS

Diaphragm Sensor (10Torr):722B11TCE2FA,Made by MKS

ATM SENSOR:"PA830 102G(SENSOR)

, PZ200(DISPLAY)"-"Made by COPAL

Main Valve:VEC-R-V80B0W2-400H,Made by CKD

Exhaust Piping

Exhaust Dilution Line

Reactor Tube Press Leak Line

Back Ground Line:SiH2Cl2, NH3, NF3

Jacket Heater for exhaust pipe:D4EX32782,Made by MKS

Seal Cap Heater :SH-13049-02,Made by SHINWA VANES

Inlet Flange heater:D7EF78958,Made by TOKYO GIKEN

Inlet Port heater:ESH-12965-02, 

ESH-12966-01,Made by SHINWA VANES

Cold Trap

Safety    

Light Curtain System:SL-C52H, Made by KEYENCE

Gas Detector (NH3 Indicator/Detector):GD-K71D-R(NH3/75PPM), Made by Riken Keiki

Gas Detector (NF3 Indicator/Detector):GD-K77DG(NF3/30PPM), Made by Riken Keiki

Gas Detector

(SIH2CL2 Indicator/Detector): GD-K71D-R

(SIH2CL2/15PPM), Made by Riken Keiki


Other    

AGV I/F UNIT: OPTION

OHT I/F UNIT:DMS-HB1-Z, Made by HOKUYO

CIDRW CONTROLLER: V700-L22-5,Made by OMRON

AMPLIFIER UNIT: V640-HAM12, Made by OMRON

CIDRW HEAD: V640-HS62,Made by OMRON

CHEMICAL FILTER-Made by TOAMEC


N2 Purge Load Lock System    

O2 Monitor / Detector:TF-21D201(RX-105063-A),Made by Energy Support

FOUP Opener N2 Purge SYSTEM, Made by Hitachi Kokusai

Loading Area MFC:HM5143B20AR, Made by Tokyo Keiso

Loading Area N2 Purge Line- Made by Hitachi Kokusai

FOUP Opener N2 Purge Line- Made by Hitachi Kokusai


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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