Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. ALPHA-303i Oxide

Asset ID: 207063

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Tokyo Electron Ltd.

ALPHA-303i Oxide

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 06/2014

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

DIFFUSION - 15-3TEL_A303I_HT - 303I -

Tool has stopped operations since April 22, 2020 and is still connected with facilities. Then it can be re-powered on.

A HARD DISK DRIVE WILL BE REMOVED.

Other missing or damaged parts: Not reported.


Tube Material:Quartz

Boat Material:Quartz(Twin Boat)

Production wafes:75

Process Gas:Ar(F.S:15slm),O2(F.S:20slm),P-N2(F.S:50slm)

Water generating Type:External Torch

MFC Maker:HITACHI-Metals

MFC Model:FC-D98series

Process Temp:600-1000deg




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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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