Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture: October 9, 2013
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 4/28/2023
A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.
Tool Model : QUIXACE (DJ-1206V-DF)
Process: LP SiN
Tube Material:Quartz(Outer),SiC(Inner)
Boat Material:SiC
Production wafes:125
Process Gas:SiH2Cl2(F.S:0.5SLM)
NH3(F.S:1SLM*2Line)
MFC Maker:STEC
MFC Model:Z500series
Process Temp:700-800deg
DP Maker:Edwards
DP Model:iH1800HTF
Pressure Control:APC Valve
Other missing or damaged parts: Not reported.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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