Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Tokyo Electron Ltd. (TEL) TELINDY Plus ALD HighK

Asset ID: 11962

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Tokyo Electron Ltd. (TEL)

TELINDY Plus ALD HighK

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: Jan - 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: 1/15/2023

Software Version: V6.07

System Power Rating: 480/120

Loading Configuration : 5


Furnace Module

I/O module

Exhaust Box

Gas Box

Power Box


Section 1. Tool General Information 
Micron MISTI/LID #  1196403/H61
Vendor Tool Serial #  S00001415054
Month / Year of Tool Move In (MM/YYYY)   
Tool Excess Date (MM/DD/YYYY) 17-Sep-22
Tool Current Status In production
Tool working condition before deinstall Working
Tool Location  Cleanroom
Any modification/conversion/refrofit was perform to the tool? No
    
Section 2. Move-out constraint  
Any layout/move-out path constraint No
If there is any move-out path constraint, please inform site reuse planning immediately and propose tool ID swap.   
Reuse tool configuration template needs to be populated based on the correct tool ID proposed for tool transfer.
    
Section 3. Tool Specific Information 
OEM  TEL
Tool Model  INDY Plus
Process  HfSiOx
Software Version (include revision #) V6.10 Rev.000 [i00C00-00000]
System Power Rating  480V 3Phase 
Loading Configuration  18 Carrier Load - FOUP/25slots SEMI STD


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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