Equipment details:
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process: ATMOXANNL
System, General Specification
Heater element Model: FURNACE,ATM –APL
Process Condition: AP
Maximum Operating Temperature: 1200c
N2 Load Lock: Yes
Wafer Type: 300 SEMI STD-Notch
Qty. of Production Wafers: 120 slots Ladder
Boat Operation: 2 Boat Type
Software Version: AVP 2.7.1 V
System, Furnace
Loading Area Light: White
Force Air Cooling system: installed
Side Maintenance: None
O2 Density control: 0-100ppm
N2 Boat shower wafer cooling: None
Furnace Temperature Controller: SSPC control
System, Wafer/Carrier Handling
Carrier Type: 12" FOUP
Carrier Stage Capacity: 16 FOUP
WTU Type: GenMark
WTU alignment: GenMark
WTU Teaching method: Pre-aligner / dual beam
System, Gas Distribution
IGS Maker / Type: Fujikin- None
IGS MFC Maker / Type: AERA- None
IGS Press Transducer Maker / Type: Mykrolis- None
System, Exhaust Specification
Vacuum Gage - 2 torr: AP tool - None
Vacuum Gage - 10 torr: AP tool - None
Vacuum Gage - 100 torr: AP tool – None
Vacuum Gage - 1000 torr: AP tool – None
Main Valve: AP tool – None
Pump Maker/Model: AP tool – None
Low vacuum valve: AP tool – None
Trap: AP tool – None
Vacuum Pressure Controller: AP tool – None
System, Reactor
Process Tube (LP): None
Outer/Inner Tube Material (LP): None
Inner Tube Type (AP): Quartz Single
Inner T/C: 12FT/HONEYWELL
Boat Materail/Type: Sic
Boat Rotation: None
Pedestal Materail/Type: Quartz
Auto Shutter: installed
System, Power Distribution
Voltage 3phase: 480VAC
Voltage Single-phase: None
Frequency: 60Hz
System, User Interface:
Operation Panel: Keyboard & Screen
Indicator Type: Mouse
Operation software type: Linux
Gas Leak Detector
Gas Leak Detector Materail/Type: GasTech
System, Fixture List, Gas
IGS maintenance Fixture: None
Vacuum Gauge: one
Missing/Damaged Parts List
None report, please inspect tool to reconfirm
Dry pumps not included
