Macquarie Semiconductor and Technology on behalf of Micron Technology Utah, LLC
Date of Manufacture: 2007
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Lehi, United States
Available date: 1/1/2022
| Vendor Tool Serial # | PGA61435WX | ||||
| Tool Model | Ebara FREX 300S | ||||
| Process | WCMP | ||||
| Software Version | 11.5 | ||||
| 208v 30phase 60HZ | |||||
| Loading Configuration | 3 load ports metro side mount | ||||
| Description | Chemicals / Gases Used | ||||
| Chm/Unit Position 1 | Slurry A | W7300-A18 | |||
| Chm/Unit Position 2 | Slurry B | none | |||
| Chm/Unit Position 3 | Slurry C | D9228 | |||
| Chm/Unit Position 4 | none | none | |||
| Chm/Unit Position ___ | Optional Chem | 0.06% | |||
| Chm/Unit Position ___ | Cleaner 2 | HF 100:1 | |||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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