Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

FEI Company Tecnai G2 F30

Asset ID: 207548

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FEI Company

Tecnai G2 F30


Metrology Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

YE Thermofisher Tecnai G2-F30

Configuration Details:

Tecnai 30ST

S/N : D297

Hight Tension : 300kV


Resolution TEM point : 0.205nm

Resolution HRSTEM : 0.16nm

Camera : Gatan 794 CCD


EELS : Gatan Tridiem


Lorentz lens

Tomography STEM/TEM



OS : Windows XP sp3

Tecnai 3.1.2

TIA 3.2 SP6

Digital Micrograph 3.9.5 for GMA 1.4.5

Objective Lens Type : ??

Essential specifications

Electron source

• Flexible high tension (50, 100, 150, 200, 250, 300 kV and values in between)

• Schottky Field emitter with high maximum beam current (> 100 nA)

• High probe current (0.6 nA in a 1 nm spot, 15 nA in a 10 nm spot)

• Small energy spread (0.8 eV or less)

• Spot drift < 1 nm/minute


• Patented TWIN, S-TWIN and U-TWIN objective lenses

• Coma-free alignment for high resolution objective-lens centering

• Ranged, rotation-free magnification and diffraction series

• Magnification reproducible within ± 1.5%

• Embedded CCD/energy filter

• Lorentz lens for field free imaging for magnetic field visualization (optional)


• Fully digital scan system

• Bright Field and Annular Dark Field mode

• High resolution STEM with HAADF detector


• Excellent EDX in-hole performance (< 1% hole count)

• Low system background in EDX (< 1% spurious peaks)

• High P/B ratio (Fiori number) > 4000

• Embedding of EDX, PEELS and energy filter

• Spectrum imaging with multiple detectors

Specimen stage

• Fully computer-controlled, eucentric side-entry, high stability CompuStage

• Maximized tilts for any X,Y,Z, α and β combination

• Choice of a variety of specimen holders

• X, Y movement ± 1 mm, Z movement ± 0.375 mm; specimen size 3 mm

• Specimen recall reproducibility: ≤ 0.3 μm (after movement of 300 μm in x and y) and ≤ 0.1 (α tilt)

• Drift ≤ 0.5 nm/minute with a standard holder attainable


• Fully interlocked differentially pumped column

• Clean vacuum system with turbo molecular pump, prepumping column, gun and specimen airlock

• 150 l/s Ion Getter Pump on specimen area • Liner tubes pumped by additional Ion Getter Pump

• Ultra-high vacuum for contamination-free observation

• Vacuum levels: specimen chamber < 2.7 × 10-5 Pa ; gun < 5 × 10-7 Pa

• Fast airlock pumping times: user selectable down to < 1 min

• Plate camera exchange without switching off high tension or emitter

Software and control

• Operations system: Windows® XP • Remote operation (optional)

• Motorized apertures (optional) • Scripting software (optional)

• Xplore3D™: FEI's intelligent tomography solution for TEM and STEM (optional)

• TrueImage: FEI's patented focal series acquisition and reconstruction software package (optional)

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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