Macquarie Equipment Trading on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Plasma System Corp. SA-2000

Asset ID: 55287

Print spec sheet

Plasma System Corp.

SA-2000

Stripper/Asher

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 200mm

Current Equipment Status: Available

Location of Equipment: Hsinchu, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.
EQUIPMENT DETAILS:                                         
General System Info
Tool ID : PSS-A3
Wafer Size (inches) : 200mm
Off-Line Date (if applicable) : 2018/01/14
Are any Manuals included ? : Std


Overall Tool Condition
Any Field Modifications ? : Yes
All Cables are present
Shipping Brackets are Included


Wafer Handler
Mini-Environment : Yes
Handler Options ? : NA


System Software
System SW (OS) version : unknown
System SW (App) version : unknown
Log-In User Name : 
亮雲
Log-In Password : SA
 
 
 
Communication Interface
GEM or SECS  : SECS
Ethernet : Y

Supporting Equipment
Backing Pump(s) : EBARAx2

Facility Requirements
CDA : 70 PsiG/min
Gas : 2 – 4 Kg/ cm2
Power : 208V100A


Missing/Damaging parts list
Quartz  x 1-->Damaging
Matcher x 1-->Damaging
ISO x 1-->Missing
Throttle valve  x 1-->Missing
Screen x1-->Missing

 

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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