Mattson Technology, Inc. Aspen III ICPHT

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

Tool Model: Aspen III HT

Software Version: 5.8B19

System Power Rating: 208AC 3-phase

Loading Configuration: 4 load ports

Chm/Unit Position 1: 2 stage/chamber HT type, PO2/PN2/4%H2N2/CF4

Chm/Unit Position 2: 2 stage/chamber HT type, PO2/PN2/4%H2N2/CF4

Process chamber

FI

Transfer module

AC power box

Transfer module: Back Robot Upper/lower arm

ATM Robot: Arm1/Arm2

ATM/VTM ROBOT control: PMAC

MFC Gas 1 (O2-10SLM)

MFC Gas 2 (CF4- 200 SCCM)

MFC Gas 3 (H2/N2-5SLM)

MFC Gas 4 (N2-2SLM)

APC(valve + control): KALREZ 8085

Gauge: MYKROLIS

EPD Controller: EP200Mmd

Heater Module: WATLOW

Heater Module: Eurotherm

RF gen. model: AE, RFG 3001+13.56 MHz+3000 W

Match

LCD Monitor

Electric&signal cable Length: estimated around 8M 

1.Main Body

1-1 Load Port: Asyst

1-2 Number of load port: 4 Load ports

2.Chamber

2-1 Bottom Temp Control: ±5℃(in wafer)

2-2 End Point Detector: Yes

2-3 Chamber Heating Control Type: WATLOW

2-4 Temp Control Range: 80℃∼300℃

2-5 Pre-Heat Function: NO

2-6 RF gen. model: AE

2-7RF gen. model: 3KW

3.System Controller

3-1 CPU: Pentium 4

3-2 Hard disk: 60GB+80GB

3-3 Operation Monitor: 15" LCD

3-4 Signal Tower: Pole type

4.Process Gas Line

4-1 MFC Maker: Aera

4-2 GAS Box Tupe: IGS Type

4-3 Number of gas Line: 

   GAS #1: O2-10SLM

   GAS #2: CF4- 200 SCCM

   GAS #3: H2/N2-5SLM

   GAS #4: N2-2SLM

5.Vacuum 

5-1 Pressure Control: KALREZ 8085

Damage/Missing parts list

Damage: Asyst Load port, Qty 1

Damage: RF cover fan, Qty 2

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales