Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

General Information

Process chamber : 2

FI: 1

Transfer module: Upper/lower arm 1

AC power box: Arm1/Arm2 2

Transfer module: Arm1/Arm2 1

ATM Robot: 1

VTM Robot: 1

ATM/VTM ROBOT control: PMAC

MFC Gas 1 (O2-10SLM): 2

MFC Gas 2 (CF4- 50 SCCM): 2

MFC Gas 3 (H2/N2-1SLM): 2

MFC Gas 4 (N2-2SLM): 2

APC(valve + control): KALREZ 8085 2

Gauge: MYKROLIS 2

EPD Controller: EP200Mmd 8

Heater Module: WATLOW 2

Heater Module: Eurotherm 2

RF gen. model: RFG 3001+13.56 MHz+3000 W 8

Match: 8

LCD Monitor: 2

Electric&signal cable Length: estimated around 8M 

Specification

1.Main Body

1-1 Load Port Brooks

1-2 Number of load port 4 Load ports

2.Chamber

2-1 Bottom Temp Control ±5℃(in wafer)

2-2 End Point Detector Yes

2-3 Chamber Heating Control Type WATLOW

2-4 Temp Control Range 80℃∼300℃

2-5 Pre-Heat Function NO

2-6 RF gen. model AE

2-7RF gen. model 3KW

3.System Controller

3-1 CPU Pentium 4

3-2 Hard disk 60GB+80GB

3-3 Operation Monitor 15" LCD

3-4 Signal Tower Pole type

4.Process Gas Line

4-1 MFC Maker Aera

4-2 GAS Box Tupe IGS Type

4-3 Number of gas Line

   GAS #1 O2-10SLM

   GAS #2 CF4- 50 SCCM

   GAS #3 H2/N2-1SLM

   GAS #4 N2-2SLM

4-4 GAS box valve NUPRO

4-5 GAS box regulator TESCOM

4-6 GAS box pressure display SWAGELOK

4-7 GAS box filter MYKROLIS

5.Vacuum 

5-1 Pressure Control KALREZ 8085

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales