Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC

Applied Materials (AMAT) Endura SL Front-End Metallization

Asset ID: 210201

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Applied Materials (AMAT)

Endura SL Front-End Metallization

PVD (Physical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: November 2002

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Singapore, Singapore

Available date: Currently Available

Four (4) chamber WCVD

Inspect to confirm configuration and condition.


General System Info
Date of Audit19-Apr-22
Fab Equipment IDWCVD-01
  
Manufacturer (Make)Applied Materials
ModelENDURA SL
Serial Number402931
  
Wafer Size (inches)12

 

 
OEM MFG Date2002/11
Install Date2003/11
Date of Last PM19-Apr-22
Is System On-Line?Yes
Off-Line Date (if applicable)Not Applicable
Can Produce Wafers As-Is ?Yes
  
CE Mark Certified ?Yes  /  No
Are any Manuals included ?Std / CR
OEM Audit Available?Yes
3rd Party Audit Available ?Yes
Decontamination Report Exists?No
Overall Tool Condition
Any Field Modifications ?No
All Cables present?Yes
Any Corrosion visible on modules ?No
Any Missing / Damaged Parts ?No
Shipping Brackets Included ?No
Wafer HandlerYes
Handler TypeFI & Transfer
# of Cassette / FOUP Loaders3
Robot TypeFI: Yaskawa FI 5.3
Transfer: VHP robot
End-Effecter TypeCeramic
Pre-Aligner ?Yes
Mini-EnvironmentYes
Handler Options ?NA
System Software 
System SW (OS) versionWindows NT 4.0
System SW (App) versionB3929
Log-In User NameAMAT
Log-In Password5989
Any SW Options ?NA
SEMI Std Options (E84, E99, etc..)E84
Communication Interface 
GEM / SECS ?Yes
HSMSYes


Serial Yes
EthernetYes
Other ?NA
Supporting Equipment 
Power SupplyYes
AC Dist BoxYes
Ext TransformerNo
UPSYes
Heat Exchanger / ChillerH2000X2EA
Backing Pump(s)IH1000X4EA, IXL12LX2EA
Facility Requirements 
CDAYes
DIWNo
VacuumYes
GasYes
Power Yes


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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