Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Endura II Front-End Metallization

Asset ID: 209968

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Applied Materials (AMAT)

Endura II Front-End Metallization

PVD (Physical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Tool Model: ENDURA2

Controller: GEN2

Software Version: eentB5.0_140

System Power Rating: 208V AC 3-Phase +480V AC Noraml

Loading Configuration: 3 load ports


Chm/Unit Position 1: EXTENSA TTN; Gas: Ar/N2

Chm/Unit Position 2: EXTENSA TTN; Gas: Ar/N2

Chm/Unit Position 4: EXTENSA TTN; Gas: Ar/N2

Chm/Unit Position C: RPC Gas: Ar/H2/He

Chm/Unit Position D: RPC Gas: Ar/H2/He

Chm/Unit Position E: DMD Degas; Gas: Ar

Chm/Unit Position F: DMD Degas; Gas: Ar


DEGAS Chamber

Chamber Position: E,F

Process Type: DMD


RPC Chamber

Chamber Position: C,D

Process Type: PCxT

Shutter Option: no

Slit Valve Seal (bonded or o-ring): Bonded

Kit, BEOL, PCxT-PRECLEAN Kit (CH C): See Below

PEDESTAL, TITANIUM 300MM PCII - REPAIR: 0020-19258

BELLJAR, 21 OD 300MM PC XT/XTE - REPAIR: 0040-55456

SHIELD, LOWER ALUMINUM 3-STRAP - REPAIR: 0040-86514

SHIELD, INNER 300MM PCXT/RPC - REPAIR: 0021-19342

INSULATOR, PEDESTAL QTZ 300MM PCII - REP: 0200-01903

SEAL, RF SPRING: 0015-01573

Clean Vendor: SHT/KTT

Shutter Part No.: NA

RF Power Supply: COMDEL CDX-2000 Dual RF Generator:AMAT P/N:0190-40655


Chamber Position: 1,2,4

Process Type: EXTENSA TTN

Current Target Material: Ti

Shutter Option: Yes

Chamber Body: Hybrid

Chamber Body p/n: 0040-76824

Slit Valve Seal (bonded or o-ring): Bonded

Magnet Type: LDR Adv TTN

Magnet Part No.: 0010-45647, 0010-45645

Magnet Serial No./ Manf. Date: no need

AMAT Target Part No.: 0190-01284

Target Vendor: NIKKO

Target Part No.: 0190-01284

Exensa TTN (CH 3) KIT, AMAT ENDURA2-EXTENSA TTN – REP : See Below

Shutter Part No.: 0021-26896

Pedestal Type: DTESC

Pedestal Part No.: 0010-42030

Cryo Restrictor: Yes

Cryo Restrictor Part No.: -

E-Magnet powersupply: P/N:0195-10842

Cathode Master P/S: AE MDX PINNACLE P/N:0190-25689

Cathode Slave P/S: AE MDX PINNACLE P/N:0190-25689

Total Cathode Power: 40 kw

RF Bias P/S: ENI GHW-12Z:0190-25529

RF Bias Generator: 1250w 13.56 MHz


Process Type: COOL

Chamber position: A,B


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales



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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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