Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Applied Materials (AMAT) Producer SE PECVD TEOS Chamber Only

Asset ID: 209713

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Applied Materials (AMAT)

Producer SE PECVD TEOS Chamber Only

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

The chamber C missing many parts.

Date of Audit 2021/8/11

The system not On-Line

The cables not all Present

Mainframe Type is Producer-SE

Directory of Process Types is PE Silane

Mainframe Items

Front-End Interface is 2 LPs 

Loadlocks is Single

Liquid Delivery Type is PLIS 

DTLR Availability is TEOS 

Gas Line # Gas

Gas Line #1 N20

Gas Line #2 N20

Gas Line #3 O2

Gas Line #4 N2

Gas Line #5 SiH4

Gas Line #6 SiH4

Gas Line #7 NH3

Gas Line #8 He

Gas Line #9 NH3

Gas Line #10 N2

Gas Line #11 N2

Gas Line #12 NF3

Gas Line #13 Ar

Gas Line #14 He

Gas Line #15 N2

Gas Line #16 TEOS

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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