Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Producer GT PECVD Silane

Asset ID: 12227

Print spec sheet

Applied Materials (AMAT)

Producer GT PECVD Silane

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Process: FRE_HAS

Software Version: B5.4_135

System Power Rating: 208 AC 3-Phase

Loading Configuration: 4 SELOP 7 25 WAFER FOUP (LOADPORT)


Chm Position 1: PE SILANE GT TWIN CHM A; Chemicals/ Gases Used: SiH4_HI, SiH4_LO, NH3_LO, NH3_HI, TMS, N2, HE_HI, NF3, AR_CLN, AR, N2O_LO, N2O_HI, O2, HE_LO

Chm Position 2: PE SILANE GT TWIN CHM B; Chemicals/ Gases Used: SiH4_HI, SiH4_LO, NH3_LO, NH3_HI, TMS, N2, HE_HI, NF3, AR_CLN, AR, N2O_LO, N2O_HI, O2, HE_LO

Chm Position 3: PE SILANE GT TWIN CHM C; Chemicals/ Gases Used: SiH4_HI, SiH4_LO, NH3_LO, NH3_HI, TMS, N2, HE_HI, NF3, AR_CLN, AR, N2O_LO, N2O_HI, O2, HE_LO


Basic System 

Technology: DCVD

Platform Type: PRODUCER GT


System Software

System software: B5.4_135

FiCGUI: fB5.20_11

GP: 8.10.21.2

DTauMacros: 9.2.44.0


Mainframe Configuration

Robot type: 0190-37624

Robot Blades: Twin blade wafer Transfer robot(FX) 0200-08347

LL preheater: 0090-04659

slit valve door: 9992-00594

MF pump: IGX600L(edwards)

LL pump: (EPX 180 TWIN DRY VACCUM PUMP)3620-00517

FI aligner : YES

Diffucer: (FV50D XL CHAMBERGARD,FAST)0190-37371


Chamber Configuration

Chamber Type: Fresco

Blocker: 0020-70842

Liner: 3 piece

RF Generator 1 (HF): APEX 3013 0920-00139

RF Generator 2 (LF): 0223-00352

"Heater: HA-12 TIGHT RF MESH WITH CLAMP

0010-36738"

Slit Valve: 9992-00594

Rf Filter: 0090-05831

Foreline: 2 inch

Foreline TV: (DNET, KF50 F/W 1.07 HIGH SPD, KALREZ 808)0190-19203

Foreline ISO: (VALVE PNEU BLWS ANGLE N/C KF-50 KALREZ 9)3870-05335

Gas box: 0041-28308(bypass type)

FACEPLATE: 0020-84596

BLOCKER: 0020-70842

PUMPING LINER side1: 0200-02407

PUMPING LINER side2: 0200-02408

LINER CERAMIC TOP: 0200-04654

LINER CERAMIC MIDDLE: 0200-02396

LINER CERAMIC BOTTOM: 0200-02397

CERAMIC ISOLATOR: 0200-04235

LIFT PINS, FLOATING(BIG FOOT): (LIFT PIN, FIXED FLOATING, 300MM)0200-06840

LIFT HOOP: 0200-08334

Spacer Side 1: 0021-24181

Spacer Side 2: 0021-24182

RPS: 0190-41326

Gas Pallet Type: Surface mount


Gas Box Configuration

Line 1: SIH4 - 800SCCM

Line 2: SIH4 - 300SCCM

Line 3: NH3_LO - 500SCCM

Line 4: NH3_HI - 4.0SLM

Line 5: TMS - 200SCCM

Line 6: NF3 - 5.0SLM

Line 7: EMPTY

Line 8: AR_CLN - 10.0SLM

Line 9: 02 - 2.0 SLM

Line 10: N2 - 25.0SLM

Line 11: HE_HI - 15.0SLM

Line 12: AR - 8.0 SLM

Line 13: N2O_LO - 2.0 SLM

Line 14: N2O_HI - 15.O SLM

Line 15: HE_LO - 5.0 SLM

Line 16: EMPTY

Line 17: N2 PURGE01

Line 18: N2 PURGE02

Line 19: EMPTY

Line 20: EMPTY

Line 21: EMPTY

Line 22: EMPTY


Damage/Missing parts list

Process Vacuum Pump: Kashiyama SD1203B(Qty:3)

Buffer pump:Edwards IH600L(Qty:1)

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.