Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

MKS Instruments AX8575-10

Asset ID: 210931

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MKS Instruments

AX8575-10

Ozone Generator

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available


Qty- 14

was connected with TEL INDY 

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The AX8575 SEMOZON® is a fully integrated, high output ozone gas delivery system that can be configured as a multi-channel system delivering ozone for up to 4 channels supporting multiple chambers or multiple tools. It has an optional in-rack chiller for ultra-high concentrations. The SEMOZON® AX8575 Ozone Delivery System is specifically designed for applications such as ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, and oxide growth.


Technical Specs

  • Type
  • Ozone Gas Delivery System
  • Ozone Output
  • 350g/Nm3
  • Flow Rate
  • 40 slm
  • Feed Gas
  • Oxygen, Nitrogen (20 - 100 ppm of total flow)
  • Feed Gas Supply Pressure
  • 50 psig (3.5 kg/cm2) nominal, 60 psig (4.2 kg/cm2) maximum, N2 pressure 10 psi higher than O2 pressure
  • Feed Gas Purity
  • 99.9995% minimum
  • Operating Temperature
  • 41 - 104°F (5 - 40°C)
  • Cooling Water Temperature Required
  • 12 - 21°C with chiller, 5 - 17°C without chiller
  • Cooling Water Filtration Required
  • 100 micron Filtration PWC (with chiller)
  • Cooling Water Quality Required
  • 1 - 3 MOhm DI, Note: Max DI water/Glycol blend: 70/30
  • Cooling Water Minimum Flow Required
  • 10 gpm nominal (water modulating valve range: 2 - 10 gpm) with chiller, 2.5 gpm per Generator (configuration dependant) without chiller
  • Cooling Water Connections Required
  • 1 in. compression (Swagelok®)
  • Cooling Water Heat Load Required
  • 10 kw (based on two generator configuration) with chiller, 5 kw per generator without chiller
  • Voltage Requirements
  • 208 volts AC (±10%), three phase
  • Current Requirements
  • 31 Amps RMS, 50 Amps service (depending on configuration) minimum of 10,000 A.I.C, 60 Amps service with chiller
  • Frequency
  • 50/60 Hz
  • Exhaust Flow Rate
  • 150 cfm (70.8 l/s)
  • Exhaust Type
  • SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
  • Exhaust Static Pressure
  • 0.10 in. (2.54 mm) H2O minimum, measured at the bottom of the duct flange adapter on cabinet
  • Control Air Pressure
  • 70 - 100 psig
  • Control Air Type
  • CDA or dry nitrogen, 40µm filtered
  • Control Air Fitting
  • 1/4 in. compression (Swagelok®)
  • Exhaust Connection
  • 6 in. diameter duct opening or 4 in. diameter duct opening
  • Dimensions
  • 24 x 75 x 36 in. (610 mm x 1575 mm x 914 mm) (width x height x depth)
  • Relative Humidity
  • 30 - 90% (non - condensing)
  • Weight
  • 600 lbs.(272 kg) for system with one generator, 880 lbs.(400 kg) for system with four generators, 1100 lbs. (499 kg) for system with two generators and internal chiller
  • Compliance
  • CE, S2 - 0302, F47
  • Altitude
  • Up to 3280 feet (1000 m) above mean sea level



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