Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
Centura AP AdvantEdge G5 Metal
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 9/2010
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
| Software Version (include revision #) | AMS 2.8_82 | |||||
| System Power Rating | 208VAC 3-Phase | |||||
| Loading Configuration | 2 Carrier Stage | |||||
| Vendor Chm Model | ||||||
| Chm/Unit Position 1 | Centura G5 | 'BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43 | ||||
| Chm/Unit Position 2 | Centura G5 | 'BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43 | ||||
| Chm/Unit Position 3 | Centura Asp | CF4/O2/N2 | ||||
| Chm/Unit Position 4 | Centura Asp | CF4/O2/N2 | ||||
Tool has been de-installed and is stored in an off-site warehouse.
Shipping kits have been installed on a FI only for rigging. The shipping kits are required to be shipped back to Fab15.
No other missing or damaged parts.
Tool is configured with endpoint.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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