Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Applied Materials Centura AP Ultima X

Asset ID: 72427

Print spec sheet

Applied Materials

Centura AP Ultima X

HDP CVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: May, 2004

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is stored in an off-site warehouse.

Shipping brackets and kits will need to be supplied by buyer.


A Hard Disk Drive will be removed from tool.


[Chamber-A]

Process:STI

Gas(sccm):

O2(400),NF3(100/200/3000),He(600/400),SiH4(300/50),H2(1000/1000),Ar(1000/3000),


[Chamber-B]

Process:STI

Gas(sccm):

O2(400),NF3(100/200/3000),He(600/400),SiH4(300/50),H2(1000/1000),Ar(1000/3000),


[Chamber-C]

Process:STI

Gas(sccm):

O2(400),NF3(100/200/3000),He(600/400),SiH4(300/50),H2(1000/1000),Ar(1000/3000),


Process Kit remains on tool.

Part Name / Part Number

Slit Valve

0190-40427

Top Nozzle

0200-05712

DOME

0200-01347

Side Nozzle

0200-05199

Cover ring 

0200-06824 or 0200-01863※

Collar

0200-00511

Insulator

0200-00374

※Changed to 0200-06824 if damaged.


Tool used to run STI process.

Other missing or damaged parts: Not reported.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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