Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2008
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Process: Oxide
Sending Site Workstation Name: 11-3TEL_SCCM_CU_04HT
Software Version (include revision #): Ver5.75-Rev000-VSTD5.70a
System Power Rating: 208 AC 3-Phase
Loading Configuration: 5 Load ports
Chm/Unit Position 1: SCCM Chemicals / Gases Used- C4F8, N2, Ar, O2, CH2F2, CHF3, CF4, C3F8, C4F6
Chm/Unit Position 2: SCCM Chemicals / Gases Used- C4F8, N2, Ar, O2, CH2F2, CHF3, CF4, C3F8, C4F6
Chm/Unit Position 3: SCCM Chemicals / Gases Used- C4F8, N2, Ar, O2, CH2F2, CHF3, CF4, C3F8, C4F6
Chm/Unit Position 4: SCCM Chemicals / Gases Used- C4F8, N2, Ar, O2, CH2F2, CHF3, CF4, C3F8, C4F6
Standard Specifications
Software Revision: Linux Ver5.75-Rev000-VSTD5.70a
Lot Stability Dummy SW: Software for running lot stability wafer.
OEE WPH Software: Site license required
GEM SEC Revision: TBD
Wafer Size: Diameter 300+/- 0.20mm(SEMI M1.15), Notch
Carrier: FOUP (Comply with SEMI E47.1 (25wafers))
Inter Face: 5 carrier stage (Continuous flow operation) with Semi compliant MENV and FIMS assemblies
Online Connection: GEM / CIM GJG (Hardware Interface : Ethernet 100Base-Tx)
Interface A: Hardware related to EDA
Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERIFLO), He/SQMICRO(VERIFLO)
Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)
Utility Box: Pressure Gauge : Bourdon Gauge
Loader Mod Corrosion Prevent: SUS Parts, Ball screw & Liner guide : PTFE Coating
Load Lock Pressure Monitor: Pressure Switch : VSA100A (INFICON)
Load Lock Pressure Monitor: Pirani gauge : TTR211S LEYBOLD)
Load Lock Pressure Monitor: CM : 626A01TDE (MKS)
Maintenance Monitor: 2 (Flat Panel Display Touch Screen Type)
Water Leak Detector: 5 (LM;1, each PS;1)
Signal Tower: Red/Yellow/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance side x1)
Data Back up: USB & Ingenio (Ingenio Management Server)
EMO: Front x3, Rear x6
Cable Length: One 15m and one 16m (Interconnection, RF cables)
Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed)
Fittings: No brass fittings
Supporting Remote Units
Chiller: UBRPD5A-2T
Coolant: Lower:FC3283, Upper:FC40
Chiller Hose: BRINE HOSE 15/14M
Handy Maintenance Controller: LCD DISPLAY UT3-TLN21-A
RF Generator TOP: AGA-50B2
RF Matcher TOP: AMN-50B2
RF Generator Bottom: WGA-50E
Matching Controller: WMN-50H6(2MHZ/5KW)(PS3)
Pen Record Box: 2L80-00212-12
Loader Module: SELME2112ZS22-AD5
LOAD PORT: SELOP12F25-30U-14
DRIVE UNIT: SBX92102928
READER OPTICAL: ISS-1700-1TELCC
Carrier ID Reader: ATR-9100 + Gateway
APC: 10 INCH (250mm)VETX
Hardware Configuration
Proc Chbr 1,2,3,4: SCCM Oxide; Y203 Coating
Chamber hardware: FCC
Endpoint type: SE2000ii
ESC type: Ceramics ESCwith STD Vpp
Focus ring: 3.4mm
Thunderwall He Gas Inlet: Ceramic Thunderwall with Ceramic pusher pins.
Polished focus ring: O
FC lower insulator: FC lower insulator w/quartz upper ring shield
Magnet Shield: O
Oring for Chbr Body-Depos: Armorcrystal
CEL Body ASSY: Brine Control Mode
TMP: FT-3301W (MITSUBISHI)-10Inch
TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS)
Dry Pump: ESR80WN, KEG approved
Final Valve, Heater: Valve; OGD10V-4RJ-K (CKD)
Filter: Filter; CEP-TM_HL-VR-03PB (Toshiba Ceramic)
APC: Pendulum Motion Dia., 250mm(VETX), R.T.~90deg
Pressure Monitor: C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa
Pressure Monitor: C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa
Pressure Monitor: B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa
Pressure Monitor: ATM Switch : 51A13TGA2AA720 (MKS)
Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas
Gas Box Configuration
Gas Line 1: Gas line 1- N2 1000 sccm-AERA FCD985CT-BF
Gas Line 2: Gas line 2- C4F8 200 sccm-AERA FC-D985CT-BF
Gas Line 3: Gas line 3- Ar 2000 sccm-AERA FC-D985CT-BF
Gas Line 4: Gas line 4- O2 50 sccm-AERA FC-D985CT-BF
Gas Line 5: Gas line 5- CH2F2 100 sccm-AERA FC-D985CT-BF
Gas Line 6: Gas line 6- CHF3 200 sccm-AERA FC-D985CT-BF
Gas Line 7: Gas line 7- CF4 200 sccm-AERA FC-D985CT-BF
Gas Line 8: Gas line 8- C4F8 50 sccms-AERA FC-D985CT-BF
Gas Line 9: Gas line 9- CO 500 sccms-AERA FC-D985CT-BF
Gas Line 10: Gas line 10- C4F6 50 sccm-AERA FC-D985CT-BF
Gas Line 11: Gas line 11- O2 1000 sccm-AERA FC-D985CT-BF
Gas Line 12: Gas line 12- Ar 500 sccm-AERA FC-D985CT-BF
Purge: N2 (Process Grade N2)
Filter: CNF1004USG4 (Nihon Pall)
Regulator: SQMICRO (VERIFLO)
Filter (N2): SQMICRO (VERIFLO)
Valve: Primary side(Utility-MFC):Mega mini (FUJIKIN)
Valve: Secondary side(MFC-PC):Mega one (FUJIKIN)
Piping: Dual Piping (for Gas leak containment, Gas box to Final valve & Exhaust through Gas box)
Gas Leak Detection Port: 5 Ports (6.35mm, Swagelok L-type)
Final Pressure Switch: 51A (MKS)
Pressure Gauge: Bourdon Gauge (with inside finishing)
Pressure Gauge: Bourdon Gauge (with inside finishing) 0.4MPa
SP3 Gas Line Connection: SP3 Gas Line Connection
GBROR
Process Kit Configuration
WINDOW, SHIELD DEPO(DRM2) QRTZ: WINDOW, SHIELD DEPO (DRM2) QUARTZ
WINDOW DEPO SAF0.5(DRM2) SAPPh: WINDOW DEPO SAF0.5(DRM2) SAPPHIRE
SHIELD, UP 300MM RING-Qrtz: SHIELD, UPPER 300MM RING - Quartz
Insulator, ESC Enclosure (COC): Insulator, ESC Enclosure (COC) - Quartz
Cover Ring, 360- L (M) - Qrtz: Cover Ring, 360- L (M) - Quartz
RING, BTM SHIELD Y-AL, SE: RING, BTM SHIELD Y-AL, SE
PLATE,EXHAUST Y-AL, SE: PLATE,EXHAUST Y-AL, SE
SHUTTER,BTM TYPE Y-AL, SE: SHUTTER, BTM TYPE Y-AL, SE
SHIELD,DEPO: SHIELD,DEPO
Focus Rg, 360-302-COC: Focus Rg, 360-302-COC
Insultr, lwr T32-R6-BL-NC: Insulator, lower T32-BI-NC
WINDOW,DEPO CLP: WINDOW,DEPO CLP
SCREW PIN LOCK, Cerazol: SCREW PIN LOCK, Cerazol
Si Upper Electrode: Si Upper Electrode
CEL ASSY: CEL ASSY
ESC ASSY: ESC ASSY (with ceramic pusher pins)
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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