Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

LAM Research 2300 Exelan Flex

Asset ID: 208425

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LAM Research

2300 Exelan Flex

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 1/28/2022

DRY ETCH 11-3LAM_EXELAN_CU_04 LAM 2300XLAN CUOX



Tool config is based on original PO, please verify tool details at tool inspection


FI SN: 1017439-10-09-0532

Chamber SN: 23EX-2437(F124886-PM1), 23EX-2438(F124886-PM2), 23EX-2439(F124886-PM3), 23EX-2440(F124886-PM4)


Tool Model: EXELAN

Process: EXELAN OX

Software Version: 1.8.4-SP11-HF5 release

System Power Rating: 208 AC 3-Phase

Loading Configuration: 3 Load ports


Chm Position 1: EXELAN; Chemicals / Gases Used: C4F8, CF4, H2, CH2F2

Chm Position 2: EXELAN; Chemicals / Gases Used: C4F8, CF4, H2, CH2F2

Chm Position 3: EXELAN; Chemicals / Gases Used: C4F8, CF4, H2, CH2F2

Chm Position 4: EXELAN; Chemicals / Gases Used: C4F8, CF4, H2, CH2F2


Standard Specs

Software Revision: 1.8.4-SP11-HF5 release

Factory Automation: OHT PIO Sensor

AMHS: AMHS - OHT or manual deliver - Factory Interface

Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch

Carrier: FOUP (Comply with SEMI E47.1 (25wafers))

Inter Face: 3 carrier stage (Continuous flow operation)

Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)

"Small Wip Buffer

FIX THIS: 4 Station Small Wip Buffer. With Semi compliant MENV and FIMS assemblies"

Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERUFLO), He/SQMICRO(VERIFLO)

Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)

Utility Box: Pressure Gauge : Bourdon Gauge

Platform Type: Version 2

UPS on system: Yes

Earth Leakage Breaker: Yes (for Fab 3 only)

Gas Box: Transport Module, GIB for 16 lines IGS GBX

Monitor: 2 (Flat Panel Display Touch Screen Type, 1; Fromt, 1; Side)

Signal Tower: Red/Orange/Green/Blue (Upper Left of Front x1 & Upper right section of loader on maintenance side x1)

EMO: Front x2, Rear x6

Conditioning Station: No

Foreline: Not Heated

Sub-panel: Dual Drop Sub-panel

Interconnect Cables: TM to sub-panel, 50 ft

Pump to TCU: 50 ft

TCU to PM: 50 ft

PM to Pump Interconnect: 50 ft

Inter Lock: Gas Box Door (I/L Signal is sent to the Factory)

Inter Lock: External (When the I/L signal is received from Factory, gas valves are closed)


Support Remote Units

Chiller Lower: ATS DEX 20A- Customer Provided

Coolant: FC3283

Chiller Hose: 5/8 ID Braided Stainless Flex- Customer Provided

RF Generator 2 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )

RF Generator 27 MHz: Including RF Cable Tru-8743-07 ( 7 ft cable )

RF Matcher, 2-27 MHz, DFC: RF Matcher, 2-27 MHz, DFC

Wafer ID Reader: WIDS Bottom Read

Carrier ID Reader: Asyst RF Advantag


Hardware Config

Process Chb.1,2,3,&4: 2300 Exelan Flex 45 Ready (Without Captive Cam Ring)

25 Wafer Input Buffer Station: KIT,JIT<OPT<25 STATION BUFFER,300MM

Endpoint type: Optical Emission Spectroscopy

ESC type: Dual Zone/Flex Bipolar

Focus ring: Hot Edge, Si

High-conductance Wap Ring: 4 Ring

Gap: 2.34 cm

TMP: TMP-Edwards 1603

Dry Pump: IH600 (EDWARDS) ; Customer Supply

Transfer Module Backing Pump: EPX with N2 Gas Module

Pressure Monitor: C/M ( Process Monitor ) 628B01TDE1B (MKS ) 1 Torr

Pressure Monitor: C/M ( Service Monitor ) 625A-14059 10 Torr

Pressure Monitor: C/M ( Foreline Monitor ) 625A-14059 10 Torr

Pressure Monitor: Absolute Pressure switch 75 Torr Lam P/N 768-093959-001

Pressure Monitor: Differential Pressure switch Activation 7mm Hg Vac Precision Sensors P/N D48W-14

Upper Electrode: Heated Constant Temperature Control

Coolant Temp Monitor Kit: Coolant Temp Monitoring Kit for Top Plate & Lower Electrode

O-Rings: FluoroSilicone

Chamber Isolation Valve: Barrier Seal Door

Wafer Lift Mechanism: Direct Drive


Gas Position

Gas line 1: Gas line 1-C4F8 50 sccm- STEC Z300

Gas line 2: Gas line 2-CF4 200 sccm- STEC D200

Gas line 3: Gas line 3-O2 3000 sccm- STEC Z300

Gas line 4: Gas line 4-Ar 1000 sccm- STEC D200

Gas line 5: Gas line 5-Blank (for future use)

Gas line 6: Gas line 6-H2 1500 sccm- STECZ300

Gas line 7: Gas line 7-O2 50 sccm-STEC Z300

Gas line 8: Gas line 8-CHF3 50 sccm- STEC Z300

Gas line 9: Gas line 9-CH2F2 100 sccm- STEC Z300

Gas line 10: Gas line 10-C4F6 50 sccm- STEC Z300

Gas line 11: Gas line 11-He/O2 (O2-30%) 100 sccm- STEC Z300

Gas line 12: Gas line 12-N2 1000 sccm- STEC Z300

Gas line 13: Gas line 13-CF4 1000 sccm- STEC Z300

Gas line 14: No gas- Need piping

Gas line 15: No gas- Need piping

Gas line 16: No gas- Need piping

Tuning Gas: He/O2(O2;30%) 50 sccm- STEC Z300


Gas Box Config

Filter: Final gas : Mykrolis  (P/N WG2FT1RR2)

Gas Box Inlet Option: Regulated Inlet Gas Panel

Non-standard PM/GB Feature: Stone Henge Gas Box / with GIB Option 16 lines single contained Hasteloy lines.

Gas Line Pressure Transducer: Actual pressure transducer WITHOUT digital readout

Regulator: SQMICRO (VERIFLO)

Piping: Single Contained Hasteloy Piping (Gas box to Final valve & Exhaust through Gas box)

Final Pressure Switch: Absolute Pressure switch 400 torr Lam P/N 796-002833-003


Process Kit Config

Upper Outer Electrode: ASSY,ELCTD,OUTER,.18 STEP,300M

Upper Inner Electrode: ASSY,ELCTD,INNER,TC,300MM

Quartz WAP Ring: RING,WAP,Twist Lock,17IN,300MM

Quartz Generic Ring: RING,WAP,QTZ

Gas Feed Ring: Ring, Ptn, Gas Feed, Dual Zone

Dual Zone ESC: ESCASSY,DZ CLG,2 FNSH,300MM

ESC Bolts: ESC Bolts - 10-32 x1.125 lng, vented

Edge Ring Cover (In): COV,H/E RING,QTZ

Focus Cover Ring: B,FOCUS R CVR,DFC 300MM

Hot Edge Ring: RING,HOT EDGE,.195 HGT,SI,DUAL ZONE ESC

Edge Ring Cover (Out): RING,COVER,OUTER,GND

Fixed Coupling Ring: RING,TOP,ADJ,CPLG,2300,300MM,D

Ground Shield: SHLD,GND,300MM,2300

Liner: LINER/SPCR,EXT GND RING,2.0CM GAP

4-ringer Hangers: HANGER,4R,.025,.08-.08-.12-.12,.010FW

Retainer Spring: ASSY RETAINER SPRING

1/4-20 Peek Nut: NUT,1/4-20,VIRGIN PEEK

Peek Clocking Washer: WSHR,FL,PEEK,.263IDX.682ODX.06THK

Peek Sleeve: SLV,ADPTR,SLIP-ON,SELFCNTR,V PEEK

0.010 Peek Pad: PAD,R,CONF,.010THK.300MM


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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