Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.

LAM Research 2300e4 Exelan Flex DX

Asset ID: 10350

Print spec sheet

LAM Research

2300e4 Exelan Flex DX

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Gyeonggi-do,, Korea, Republic of

Available date: Currently Available

  1. 2300e4 Platform 

1 * 3 FOUP TDK 

3 * Hermes Carrier ID 

1* Light Curtain w/ OHT/RGV

1* 25 Slot Input Buffer Station

1* WIDS Btm Read

1* Conditioning Station (7 Wafer)

1* User Interface: Side and Front Monitor U

1* System UPS Circuitry

1* Earth Leakage Breaker

1* Cable: TM-Subpanel, 100ft

1* Signal Light Tower, R-O-G-B Slim Line 

1* Sys Calibration and Alignment

1* VTM Breakout Board/Cover

1* NSR 101271,input buffer stat anti-corros

1* NSR100301, SST Gas Filter

1* Software Variable ID (Sensor Box) 

1* Robot CDM 

1 * Light Tower Buzzer 

1 * APCS 

1* Metric to Inch Conv. Fittings 

1* 25 Slot Aux Buffer (Corr Res) 

1* VTM Pump: Edwards (EPX) 

1* Vespel Single Sense 

1* NSR10702, N2 Flow Monitoring on UPC 


  1. 2300 PROCESS MODULE(2300 FLEX D Series Options)

3* 4XX Series ESC

3* PM Facilities: Dual w/ Temp Monitor 

3* 10 GPM Flow Meter 

3* 60 MHz Generator 

3* Polished Hardware Finish 

3* Dual Zone ESC Cooling -Flex D Series 

3* Heated Foreline Manometer 

3* Interconnect Hardware: Pump to TCU 100ft 

3* Interconnect Hardware: TCU to PM 100ft 

3* Interconnect Hardware: Pump to PM 100ft 

3* EMO Cable: TCU to RPDB 50ft

3* EMO Cable: Pump to RPDB 50ft

3* NSR10508, Shaft Seal for TCU hose fittin 

3* NSR10061, High Pressure Coolant hose FOX 

1* 2300 Flex D Series Quick Clean Kit 


  1. 2300 GAS BOX

3* 2300 FLEX D SERIES JETSTREAM 

30 * Jetstream Gas Line 

6* Heated Gas Line 

1* Facility Interface Box (System)

17 * Facility Interface Box (Per Line) 

1* Future PM Containment 


  1. 2300 PERIPHERALS

1 * Dual Drop Subpanel (2 Ch TCU) 


  1. 2300 SHIP AHEAD

1* Standard Ship Ahead Items


  1. 2300 Software

1* TEK Software 

1* Wafer Flow Tuning 

1* APC Recipe Tuning Host

1* 2nd HSMS 

1* NSR8423, Hardware Firewall

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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