Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Risshi / Maruyama eYR-9030DC-LP

Asset ID: 211249

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Risshi / Maruyama

eYR-9030DC-LP

Chiller/Heat Exchanger

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Qty-25- Not overhaul


OH VendorModuleS/N
maruyamaeYR-9030DC(LP)1607734
maruyamaeYR-9030DC(LP)1607735
maruyamaeYR-9030DC(LP)1511676
maruyamaeYR-9030DC(LP)1512728
maruyamaeYR-9030DC(LP)1512725
maruyamaeYR-9030DC(LP)1512727
maruyamaeYR-9030DC(LP)1509507
maruyamaeYR-9030DC(LP)1509505
maruyamaeYR-9030DC(LP)1510540
maruyamaeYR-9030DC(LP)1510542
maruyamaeYR-9030DC(LP)15116111
maruyamaeYR-9030DC(LP)1601016
maruyamaeYR-9030DC(LP)1511606
maruyamaeYR-9030DC(LP)1601015
maruyamaeYR-9030DC(LP)1512763
maruyamaeYR-9030DC(LP)1412347
maruyamaeYR-9030DC(LP)1505217
maruyamaeYR-9030DC(LP)1505216
maruyamaeYR-9030DC(LP)1505207
maruyamaeYR-9030DC(LP)1505205
maruyamaeYR-9030DC(LP)1601017
maruyamaeYR-9030DC(LP)1412348
maruyamaeYR-9030DC(LP)1602109
maruyamaeYR-9030DC(LP)1403052
maruyamaeYR-9030DC(LP)1512761



eYR Dual Channel Series

While any of our single channel units can be replicated and made into a dual-channel unit (two channels in one housing with identical specifications), our newest dual-channel unit, the eYR-9030DC(LP) has two different channels targeting two different areas in a process tool.

The Cold Channel is specified to control the temperature of a bottom electrode, while the Hot Channel is specified to control the temperature of the top electrode or the wall of the chamber using either inert coolant or DI water. A dual-channel design reduces overall footprint when compared with two single channel units. In addition, internal parts can be reduced and shared such as the main power breaker. Instead of two breakers, there can be just one main breaker for both channels. There can also be one facility water port instead of two, depending on your facility water temperature and flow configuration.

Basic SpecificationseYR-9030DC(LP)
Controlled Temperature RangeHot Channel20℃ to 60℃
Cold Channel-10℃ to 60℃
Temperature Control AccuracyFrom set temperature with constant heat load±1.0C
Cooling Capacity: Cold Channel**60Hz10,000W ±500W @ -10℃
Cooling Capacity: Hot Channel**60Hz12,000W ±500W @ 20℃
Heater Capacity @ AC200VCold Channel1800W±100W
Hot Channel
Power Consumption (200/220VAC)Maximum22 .5kVA
Current65A
User InterfaceTouch Panel
External Dimensions (W x D x H)Inches26 x 38 x 63
MM650 x 970 x 1600
Standard Communications ProtocolLonWorks
Lam Part Number778-140687-001




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