Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

FSI International Zeta 300 G3

Asset ID: 209758

Print spec sheet

FSI International

Zeta 300 G3

Batch Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

Need use the destructive methods to deinstallation the equipment.

The robot is missing and the PC is damaged.

Model:ZETA300 G3

Original Ship Date from FSI 2006/10/12

Date of Last PM 2016/05/12

Off-Line Date is 2017

Electronics Console Type is Short

Directory of System Types

OC:50 wafer at a time

MP:Multi Position

MHS:Material Handling System

Key Common Options

Clean Room Manuals 

Standard Manuals 

Chemical Canister Consoles is 2  

Turntable Style is Titanium 

Robot Type

BROOKS 2406 V2 MHM ROBOT

史陶比而 TX90XLSCRFSI2 CASSETTE ROBOT 

Process Modules

1.Fluid Delivery Module (FDM)

2.Process Module (PM)

3.Material Handling Module (MHM)

4.Canister Console(s)

5.Power Distribution Cabinet

Canister #

1.H2O2(1)

1.H2O2(2)

1.NH4OH

2.HCL 

2.DHF

2.H2SO4

Overall Condition:Some parts are missing and cannot be turned on

Visible Corrosion:No

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.