Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Dainippon Screen Mfg. Co. FC-3000

Asset ID: 19336

Print spec sheet

Dainippon Screen Mfg. Co.

FC-3000

Batch Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: October, 2005

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed by a third party and is currently located in an off-site warehouse.

Shipping brackets and kits will need to be supplied by buyer.

A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.


[Bath 1]

 APM(35/65deg,20l/min,circuration)

 Chemical spiking: auto concentration feed back

 Bath material :Quartz

 Megasonic :730kHz,600W*2


[Bath 2]

 Cold DIW

 Rinse(25deg,30l/min)

 Bath material :Quartz

 Megasonic :730kHz,600W*2


[Bath 3]

 Cold DIW

 Rinse(25deg,30l/min)

 Chemical injection: APM

 Bath material :Quartz

Megasonic :730kHz,600W*2


[Bath 4]

 Cold DIW

 Rinse(25deg,30l/min)

 Bath material :Quartz


[Bath 5]

 SPM(110deg,20l/min,curculation)

 Chemical spiking: periodic spiking

 Bath material :Quartz


[Bath 6]

 Hot DIW

 Rinse(75deg,30l/min)

 Bath material :Quartz

 Megasonic :730kHz,600W*2


DRYER

 type LPD

 IPA/N2 170deg

 200l/min


No Other Missing or Damaged parts are reported.

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.