Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Aviza Technology, Inc. RVP-300

Asset ID: 9430

Print spec sheet

Aviza Technology, Inc.


Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 12/3/2021

Process: ANNEAL

Tool config is based on original PO, please verify tool details at tool inspection

System, General Specification
Heater element Model    FURNACE,ATM -APL
Process Condition    AP
Maximum Operating Temperature    1200c
N2 Load Lock    Yes
Wafer Type    300 SEMI STD-Notch
Qty. of Production Wafers    120 slots Ladder
Boat Operation    2 Boat Type
Software Version    AVP 2.7.1 V

System, Furnace
Loading Area Light    White    2
Force Air Cooiling system    installed    1
Side Maintenance    None    None
O2 Density control    0-100ppm    1
N2 Boat shower wafer cooling    None    1
Furnace Temperature Controller    SSPC control    9

System, Wafer/Carrier Handling
Carrier Type    12" FOUP
Carrier Stage Capacity    16 FOUP
WTU Type    GenMark
WTU alignment    GenMark
WTU Teaching method    Pre-aligner / dual beam

System, Gas Distribution
IGS Maker / Type    Fujikin
IGS MFC Maker / Type    AERA
IGS Press Transducer Maker / Type    Mykrolis

System, Exhaust Specification    
Vacuum Gage - 2 torr    AP tool 
Vacuum Gage - 10 torr    AP tool 
Vacuum Gage - 100 torr    AP tool 
Vacuum Gage - 1000 torr    AP tool 
Main Valve    AP tool 
Pump Maker/Model    AP tool 
Low vacuum valve    AP tool 
Trap    AP tool 
Vacuum Pressure Controller    AP tool 

System, Reactor    
Process Tube (LP)    None
Outer/Inner Tube Material (LP)    None
Inner Tube Type (AP)    Quartz Single
Boat Materail/Type    Sic
Boat Rotation    None
Pedestal Materail/Type    Quartz
Auto Shutter    installed

System, Power Distribution    
Voltage 3phase    480VAC
Voltage Single-phase    None
Frequency    60Hz 

System, User Interface    
Operation Panel    Keyboard & Screen
Indicator Type    Mouse
Operation software type    Linux

Gas Leak Detector    
Gas Leak Detector Materail/Type    GasTech

System, Fixture List, Gas    
IGS maintenance Fixture    None
Vacuum Gauge    None

Damage/Missing parts list
Dry pumps, quartz and profile TC are not included with sales
Please inspect tool to reconfirm

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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