Equipment details:
Date of Manufacture: Sep 2012
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
Tool has been deinstalled and in the warehouse.
Inspect to confirm configuration and condition.
Tool Model: DJ-1206VN-DF
Process: Poly_DS
Software version: V01.66.01
System power rating: 120VAC 1PHase
Loading configuration: 5 lots loading
Furnace Unit:1. Cartridge Heater, Qty 1
2. T/C for Heater Control, Qty 5
3. T/C for Over temperature Protection, Qty 5
4. 5-P T/C for Cascade Control, Qty 1
Controller:1. Main Controller (OU) , Qty 1
2. Main Operation Unit, Qty 1
3. Sub Operation Unit, Qty 1
4. Process Module Controller, Qty 1
5. Temperature Controller, Qty 2
7. MFC/ Pressure Unit, Qty 1
8. FOUP Loader Controller Unit, Qty 1
9. Wafer Handling Controller Unit, Qty 1
10. Valve/Interlock Control Unit, Qty 1
11. Switching Unit, Qty 1
12. Signal Tower (Front) , Qty 1
13. Gas Flow Pattern Panel, Qty 2
Drive Mechanisms:1. I/O Shutter, Qty 1
2. AGV/PGV/OHT Stage, Qty 1
3. FOUP loader, Qty 1
4. Rotation FOUP Storage, Qty 1
5. FOUP Opener, Qty 1
6. Wafer Detection, Qty 2
7. Wafer Transfer, Qty 1
8. Variable Wafer Pitch Converter, Qty 1
9. Boat Elevator, Qty 1
10. Boat Changer, Qty 1
11. Furnace Port Shutter, Qty 1
12. Boat Rotation, Qty 1
Gas System:1. Gas Unit (IGS) , Qty 1
Exhaust System:1. Dry Pump & Mechanical Booster Pump, Qty 1
2. Pressure sensor (1000 Torr) , Qty 1
3. Pressure sensor (10 Torr) , Qty 1
4. Pirani sensor, Qty 2
5. Main valve, Qty 1
6. Exhaust Piping, Qty 1
7. Exhaust Dilution Line, Qty 1
8. Reactor Tube Press Leak Line, Qty 1
10. Jacket heater pipe exhaust pipe, Qty 1
11. TapeHeater for exhaust pipe, Qty 1
12. Inlet Heater, Qty 1
13. Valve Heater, Qty 3
Safety:1. Light Curtain System, Qty 1
Other:1. OHT I/F Unit, Qty 2
2. Gateway-HSMS, Qty 1
3. RF ID Reader, Qty 2
4. Chemical Filter, Qty 2
N2 Purge Load Lock System:
1. O2 Monitor/Detector, Qty 1
2. FOUP Opener N2 Purge System, Qty 1
3. Loading Area N2 flow control MFC, Qty 1
4. Loading Area N2 Purge Line, Qty 1
5. FOUP Opener N2 Purge Line, Qty 1
