Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. TELFORMULA ALD High-K

Asset ID: 205764

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Tokyo Electron Ltd.

TELFORMULA ALD High-K

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: May, 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is stored in an off-site warehouse.


A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.


Tube Material:Quartz

Boat Material:Quartz

Production wafes: 100

Pressure control:APC Valve 

Process Gas: ZyALD(F.S:1.0sccm),TMA(F.S:500sccm),O3(F.S:20slm,200g/m3),N2,OCTANE

Vaporizer Maker: STEC(TMA,TEMAZ)

Vaporizer TYPE: LSC-F700(TMA),TL-2011(TEMAZ)

MFC Maker:HITACHI-Metals

MFC Model: FCPAR78 series

Process Temp: 200-300deg

Ozonizer Maker: TMEIC

Ozonaizer Type: OP-500H

Pump Maker: EDWARDS

Pump Type: iXH1820


Other missing or damaged parts: Not reported.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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