Macquarie Equipment Trading on behalf of Micron Technology, Inc. (VA)

Tokyo Electron Ltd. ALPHA-303i Nitride

Asset ID: 19309

Print spec sheet

Tokyo Electron Ltd.

ALPHA-303i Nitride

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2004

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available

Process: NITR

From original tool PO, please inspect to verify

Safety Specification    S2-0200/ CE-Mark(STD)
Heater Model    FTP VOS-56-003 4Zone / RT-1000(C ) /with RCU
Process Condition    LP
Maximum Operating Temperature C    950
ART Control    N/A
N2 Load Lock    YES
Wafer Type    300mm-Si SEMI STD-Notch
Qty. of Production Wafers    100
Boat Operation (Handing Position)    2 Boat Type
Software Version (WAVES)    Ver 2.13 (WAVES)
Dewpoint Meter for N2 Load Lock    None
RCU Duct Length FNC - RCU    N/A
Ionizer Maker / Model    ION system / 4052e(controller):4610TF(ionizer)
Chemical Per-filter (for Acid)    None
Chemical Per-filter (for Alkali)    None
Chemical Per-filter (for Hydrocarbon)    None
Side Maintenance    None
O2 Density control for N2 Load Lock    Yes
N2 Boat Shower Wafer Cooling    Yes
Fumace Temperature Controller    Model560A
Carrier Type    FOUP/25slots SEMI STD
FOUP Maker / Model    ASYST/GEN3
Carrier Stage Capacity    16
Info Pad A,B    None
Info Pad C,D    None
Fork Material    1+4/ AI2O3(STD)
W/T Type    1+4 Edge Grip
W/T Auto Teaching    No
Furnace Exhaust Connection Point    Top Connection
Cooling Water Connection Point    Bottom Connection
RCU Duct Connection Point    N/A
IGS Type    IGS 1.5"W-seal rail-mount
IGS Maker    Fujikin
Tubing Bends    Bend (STD)
IGS Final Filter    MYKROLIS(Ni)
IGS Regulator    VERIFLO
IGS MFC Maker / Type    AERA
IGS Press. Transducer    NAGANO
Liquid Source Vapor System Maker / Model    None
Auto-Refill System Maker / Model    N/A
Auto-Refill System Provided By    N/A
Refill System Tubing Interconnect By    N/A
Ozone Delivery System Maker / Model    None
Ozone Delivery System Provider    N/A
Extemal Torch Unit    N/A
Water Vapor Generator (WVG)    N/A
PAC    None
Incoming Gas Connection Point    Bottom Connection
Gas Vent Connection Point    Bottom Connection
Exhaust Vent Connection Point    Top Connection
Gas Unit Exh. Connection point    Bottom Connection
Process Gas Exhaust connection point    Bottom Connection
Vacuum Gage - Press Ctrl    MYKROLIS
Vacuum Gage - Press Monitor (133kPa)    MYKROLIS
Vacuum Gage - Pump Monitor    MYKROLIS
Main Valve    CKD Combination valve
Pump Maker / Model    EDWARDS/IH1800 (30000L/min)
Pump Provided by    Customer
Abatement System Type    Buming Type
Abatement System Maker / Model    OSC 1862WA (thermal wet)
Abatement System Provided by    Customer
N2 Dilution Unit Provided by    Gas cabinet exhaust
Pump Power    Facility provide
Pump Control Unit Steeing Location    
Pump-FNC Vacuum Piping Provided By    Customer
Exhaust Pressure Control for AP Process    N/A
Exhaust Pressure Control for AP Process Maker / Model    N/A
Vacuum Exhaust System    New Type
Trap    Piping Trap
Vacuum Pressure Controller    CKD-VEC
Burn Out Unit    N/A
Condenser    N/A
Quartz Material Requirement    
Quartz Provided by    
Quartz Vendor Requirement    
Quartz Stamp    
SiC Provided by    
SiC Vendor Requirement    N/A
Liner Tube(AP)    N/A
Process Tube(AP,AP+Sub-AP)    N/A
Outer/Inner Tube Material (LP)    Ouartz / Quartz
Inner Tube Type (LP)    Reduce
Inner T/C    Outer Tube interior wall type (for CVD)
Tube Sealing    O-Ring
Manifold Heater    None
Switch Valve for Manifold Cooling Water    The reinforced cooling water is used
Soft Backfill Injector    Yes
Boat Type    141Slots loader
Boat Material    SiC with CVD-Coat
Boat Rotation    Yes
Pedestal Type    Quartz+SiC
Cap Heater    Yes
Auto Shutter    Shutter Purge Type
Earthquake Countermeasure    N/A
Voltage 3phase    480VAC
3phase connebtion type    Beaker Terminal
Voltage Single-phase    120VAC
Single-phase connection type    Beaker Terminal
Frequency    60Hz
Wattmeter Maler / Model    None
Control Power UPS provided by    Customer
Control Power UPS type    Fab-wide system
UPS Input Voltage / Output Voltage    N/A
Power Cable Input Entrance Location    Power Box Top
FNC - Power Box    
Power Box - RCU    
Power Box - Pump Unit    
Power Box - Refill System (if used)    N/A
Power Box - WVG CTRL Unit (if used)    N/A
FNC - WVG CTRL Unit (if used)    N/A
Power Box - Scrubber System (if used)    N/A
Power Box - Ozone Delivery System (if used)    N/A
Power Box - UPS (if used)    N/A
Wiring by    Customer
Conduit/Raceways provided by    Customer
Host Communications    Comply with GJG
Equipment Host I/F Connection    Gas box top (OP)
Ingenio    Yes
OHT Capability    Yes
AGV Capability    None
RGV Capability    None
PGV Capability    None
PIO I/F Location    FNC Top
PIO Provided by    TEL
PIO Maker /Model    Hokuyo / DMS-HB1-Z05
Carrier ID Reader Writer Type    RF
CIDRW Load Port    Read
CIDRW FIMS    Write
CIDRW Maker / Model    OMROM/V700-L21
CIDRW Provided by    TEL
EEC(Equipment Engineening Capability)    None
Customized Management Signals(for WAVES)    N/A
Signal Tower Model    LOUGWB-24-4
Signal Tower Colors (from the Top)    Red/Blue/Yellow/Green
Signal Tower Location    Front / operation panel type
Front Operation Panel    Yes
MMI and Gas FlowChart    FPD & GFC installed
Indicator Type    Selete
Operator Switch    Operator Access/White Cover with Orange Light
Pressure Display Unit (Gas Inlet / Vacuum)    MPa / Torr
Cabinet Exhaust Pressure Display Unit    Pa
Waming Label    English
Furnace (Exh/Box,Gas/Box included)    Main-Fab
Power Box    Sub-Fab
Pump    Sub-Fab
RCU    Yes
Step Up Transformer    N/A
Step Down Transformer    N/A
Ozone Delivery System    N/A
WVG Controller    N/A
Auto-Refil System    N/A
UPS    None
Other Unit Location    N/A
Gas Leak Detector    Yes
Gas Leak Detector Provided By    TEL
Gas Leak Detector Maker    Riken
Gas Detector Power    Power box

Facility List    2192-152150-1    
System Layout Drawing    2192-152150-12    
Elecrtriicl System Diagram        
Cooling Water System Diagram        
Conduiting(Wire-Way)Work Among Boxes        
Gas Flow Chart Drawing and Gas Parts List    2192-344915-15    
Valve Interlock    Rev.3    
Safety Interlock    Rev.3    
External Input / Output Table    Rev.3    
Signal Tower Special Sequence    Rev.3    
Quartzware List    Rev.2    
Quartz Outer Tube    2105-220823-51    For FTPVD(100wafers)
Quartz Inner Tube    2105-220823-51    Reduce (∮384-354) earthquake proof
"Quartz Manifold
Cover"        
Quartz Injector    1105-401705-51    L=300mm (DCS)
Quartz Injector        Straight(O2,N2O)
Quartz Injector        
"Quartz, Soft Backfill
Injector"    1187-182977-11    SBI (NH3,H2 line)
Quartz N2 Injector    2105-420544-51    L=600 (Back N2)
SiC Boat    2105-120868-51    "6.3mm Pitch,141slots
Earthquake proof"
"Quartz Pedestal
Base"    2105-120852-51    Stand blast OD345,H330 3fins For FTP
Quartz Fins    1105-302146-12    Small Diameter OD248,T=5,P=13
Quartz Fins    1105-302148-12    Large Diameter OD345,T=5,P=13
Quartz Cap Cover    2105-220853-51    OD414,Flat type TC port:196 for CVD
Quartz Shutter    Yes    OD408 For LP-CVD
Quartz T/C Guide        
Quartz T/C Port Cap        

HAND VALVE    "HV1~15
HV16"    "FUDDFL-21-6.35UGF-APD
FUBFL-71-9.52-PA"    FUJIKIN
FILTER    F1,6,7    WG3SS2WW2    MYKROLIS
FILTER    F2~5,8~10    WG3SS1WW2    MYKROLIS
FILTER            
REGULATOR    RG1    SQ140E-50-2P-UPG-PA    VERIFLO
REGULATOR    RG2~6    SQ-MICRO-HF-50-2P-UPG-6010-EV    VERIFLO
PRESSURE TRANSMITTER    PT1~7    ZT15-Z20-17110(-0.1~0.5Mpa)    NAGANO KEIKI
DIGITAL PANEL METER    PT1~7    "AM2132A11TEL70CGM
(-0.1~0.5Mpa)"    ASAHIKEIKI
MASS FLOW CONTROLLER    MFC-NX,N1    FC-D985CY-BF-TC N2 50Slm    ADVANCED ENERGY
MASS FLOW CONTROLLER    MFC-NY,N4    FC-D985CY-BF-TC N2 1Slm    ADVANCED ENERGY
MASS FLOW CONTROLLER    MFC-N2    FC-D985CY-BF-TC N2 10Slm    ADVANCED ENERGY
MASS FLOW CONTROLLER    MFC-N3    FC-D985CY-BF-TC N2 5Slm    ADVANCED ENERGY
MASS FLOW CONTROLLER    MFC-M1    FC-D985CY-BF-TC NH3 200Sccm    ADVANCED ENERGY
MASS FLOW CONTROLLER    MFC-M2    FC-D985CY-BF-TC NH3 2Slm    ADVANCED ENERGY
MASS FLOW CONTROLLER    MFC-D1    FC-D985CY-BF-TC SiH2Cl2 200Sccm    ADVANCED ENERGY
MASS FLOW CONTROLLER    MFC-J1    FC-D985CY-BF-TC N2O 500Sccm    ADVANCED ENERGY
MASS FLOW CONTROLLER    "MFC-H1
MFC-O1
"    "FC-D985CY-BF-TC H2 5Slm
FC-D985CY-BF-TC O2 5Slm"    ADVANCED ENERGY
MASS FLOW METER            
MASS FLOW METER    MFM-D1    FM-D865Y-BF-TC SiH2Cl2 200Sccm    ADVANCED ENERGY
MASS FLOW METER            
AIR OPERATE VALVE    NX2,N12    FPR-UDDFA-21-6.35UGF-APD    FUJIKIN
AIR OPERATE VALVE    NY2,N22,32,42,NR2    FPRSDA-21-6.35UGF-ADP    FUJIKIN
AIR OPERATE VALVE    M11,21,D11,H11,O11,J11 WITH P.S    FBSDAL-RS20-6.35UGF-2B3-DVD    FUJIKIN
AIR OPERATE VALVE    M17,D17,J17WITH P.S    FBSDAL-RS2-6.35UGF-1B3-DVD    FUJIKIN
AIR OPERATE VALVE    M12-14,22-24,D12-14,H12-14,O12-14,J12-14    FBSDAL-6.35UGF-2B3-DVD    FUJIKIN
AIR OPERATE VALVE    M15,25,D15,H15,O15,J15WITH P.S    FBSDAL-RS2-6.35UGF-1B3-CKP    FUJIKIN
AIR OPERATE VALVE    Z01.02.03.04.05.06.07.08.09    FBSDAL-6.35UGF-1B3-DVD    FUJIKIN
CHECK VALVE    CV1,9,13,17    FUCDF-21-3.35-AKH    FUJIKIN
CHECK VALVE    CV2    FUCDF-21-3.35-CR-AKH    FUJIKIN
CHECK VALVE    CV21    FUCDF-21-3.35-ER-AKH    FUJIKIN
CHECK VALVE    CV3,6    FUCL-71-6.35JRx6.35UGF-0.023-CR-APD    FUJIKIN
CHECK VALVE    CV10,14,18    FUCL-71-6.35JRx6.35UGF-0.023-APD    FUJIKIN
CHECK VALVE    CV22    FUCL-71-6.35JRx6.35UGF-0.023-ER-APD    FUJIKIN
CHECK VALVE    CV    FUCL-71-6.35UGFx6.35JR-0.023-KA-APD    FUJIKIN
CHECK VALVE    CV4,7    FUCL-71-6.35UGFx6.35JR-0.023-CR-APD    FUJIKIN
CHECK VALVE    CV11,15,19    FUCL-71-6.35UGFx6.35JR-0.023-APD    FUJIKIN
CHECK VALVE    CV23    FUCL-71-6.35UGFx6.35JR-0.023-ER-APD    FUJIKIN
AIR OPERATE VALVE            
AIR OPERATE VALVE            
PRESSURE SWITCH    P.SW1.2    AP-33PA    KEYENCE
ORIFICE    "OF1
OF2"    "UGF-U-4-26-0.4
UJR-6.35RE-RG-0-0-0.04"    FUJIKIN
AIR OPERATE VALVE    NR3    FPR-SD-71-6.35    FUJIKIN
FILTER    F11    GSG-V4-1-M    MOTT
REGULATOR UNIT    RG7,BV1    AG2590-02-X648    SMC
REGULATOR UNIT    RG8,BV2    AG2590-02-X647    SMC
REGULATOR            
PRESSURE SWITCH            
HAND VALVE            
HAND VALVE            
AIR OPERATE VALVE    VV1 WITH P.S    FPR-71-9.52-2-PA-BR    FUJIKIN
AIR OPERATE VALVE    IV1 WITH P.S    FPR-71-RS1-9.52-PA    FUJIKIN
AIR OPERATE VALVE    IV2 WITH P.S    FP-71RS1-6.35-PA    FUJIKIN
AIR OPERATE VALVE    IV7 WITH P.S    FPR-71-RS1-9.52-PA-BR    FUJIKIN
AIR OPERATE VALVE    VV2 WITH P.S    FPR-71-9.52--PA    FUJIKIN
CYLINDER VALVE    MV    VEC-SH8G-X0101    CKD
CHECK VALVE    CV25    IC8-3/1-VUA-48    KITZ
CAPACITANCE MANOMETER    VG1    CMLH-11-150S06    MYKROLIS
CAPACITANCE MANOMETER    VG2    CMLH-31-150S06    MYKROLIS
CAPACITANCE MANOMETER    VG3    CMLH-11-150S06    MYKROLIS
MANOMETER CONTROL UNIT    VG1-3    HPC-20(150C)    MYKROLIS
PIRANI GAUGE            
PRESSURE SWITCH    P.SW11    223B-22809    MKS
MANUAL BUTTERFLY VALVE            
DRY PUMP UNIT    MBP/DP    IH1800HTX    EDWARDS
N2 DIlution Unit     NDU    NDU600    EDWARDS
BALL VALVE    BV21    FUBV-93-19.05    FUJIKIN
FILTER    F21-25    WGMXMBSS3    MYKROLIS
REGULATOR    RG21-23    SQ420E-100-2P-6T-5422    VERIFLO
PRESSURE GAUGE    PG21-23    GW16-6K3-270000 0-1.0MPA    NAGANO KEIKI
FLOW CONTROL SYSTEM    "NL
LA1,2"    "FC-2926V-8V N2 400SLM
FPR-91-19.5"    "MILLIPORE
FUJIKIN"
FLOW METER    "FM NFL
FM NFS,NFA"    "P-510-UA-6N-S4-N2-400L-N-2M-MPA0.3
P-510-UA-6N-S3-N2-150L-N-2M-MPA0.3"    TOKYO KEISO
AIR OPERATE VALVE    LA3,PB1    FPR-91-9.52    FUJIKIN
FILTER            
BALL VALVE            
REGULATOR            
PRESSURE SWITCH    BV22-RG24-P.SW21    SU45-0552(K)    KURODA
BALL VALVE    BV41    FUBV-915-9.52    FUJIKIN
FILTER    F41    WGMXMBSS3    MYKROLIS
REGULATOR    "RG41
RG42"    "SQ420E-100-2P-6T-5422
SQ420E-100-2P-FS-MM"    VERIFLO
PRESSURE GAUGE    PG41,42    "GW16-6K3-270000 
0-1.0MPA"    NAGANO KEIKI
FLOW CONTROL SYSTEM            
FILTER            

FLOWER METER    NFB    "P-510-UA-6N-S3-N2-
100L-N-2M-MPA0.3"    TOKYO KEISO
FLOWER METER    NFC,NFD    P-821-3A-6F-S2-M-N2-30L-2M-MPA0.3    TOKYO KEISO
AIR OPERATION VALVE    LA4    FPR-91-9.52    FUJIKIN
AIR OPERATION VALVE    PB2,3    FPR-91-6.35    FUJIKIN
BALL VALVE    BV42    FUBV-915-12.7    FUJIKIN
FILTER    F42    WGMXMBSS3    MYKROLIS
REGULATOR    RG43    SQ420E-100-2P-6T-5422    VERIFLO
PRESSURE SWITH    PG43    GW16-6K3-270000 0-1.0MPA    NAGANO KEIKI
PRESSURE GAUGE    LA5    FPR-91-19.5    FUJIKIN
AIR OPERATION VALVE    P.SW42    AP-C33    KEYENCE
PRESSURE SWITCH    F43,44    WG2F-T1S-S2    MYKROLIS


Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps not included on sales    

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