Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

P.S.K. Tech Inc. Supra V

Asset ID: 79198

Print spec sheet

P.S.K. Tech Inc.

Supra V

Stripper/Asher

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Process: Asher strip 

Software Version: 1.63 

System Power Rating: 208V 3-Phase 

Loading Configuration: 3 load position


Chm/Unit Position 1: 2 stage / chamber; Chemicals / Gases Used: PO2/PN2/4%H2N2/NH3

Chm/Unit Position 1: 2 stage / chamber; Chemicals / Gases Used: PO2/PN2/4%H2N2/NH3

Chm/Unit Position 1: 2 stage / chamber; Chemicals / Gases Used: PO2/PN2/4%H2N2/NH3


Process chamber : Supra V- Qty 3

EFEM module: Supra V- Qty 1

TM module: Supra V- Qty 1

AC power box: Supra V- Qty 2

TM Robot: SANKYO- Qty 1

TM ROBOT control: SANKYO- Qty 1

EFEM Robot: SANKYO- Qty 1

MFC Gas 1 (O2-20SLM): STEC- Qty 3

MFC Gas 2 (N2-3SLM): STEC- Qty 3

MFC Gas 2 (H2/N2-5SLM): STEC- Qty 3

APC(valve + control): MKS- Qty 3

BARATRON Gauge: MKS- Qty 3

Pressure Transducer (Pirani): MKS- Qty 3

EPD Controller: NANOTEK- Qty 6

Heater Module: WATLOW- Qty 6

PICP: LANDMARK- Qty 6

LCD Monitor: JINYOUNG- Qty 2


1.Main Body

1-1 Load Port: Fixed Buffer

1-2 Number of load port: 3 Load ports

1-3 System wide corrosion free: Yes(SUS304)

2.Chamber

2-1 Bottom Temp Control: ±5℃(in wafer)

2-2 End Point Detector: Yes

2-3 Chamber Heating Control Type: P.I.D

2-4 Temp Control Range: 80℃∼300℃

2-5 Pre-Heat Function: Yes(ISBP)

2-6 PICP Generator Maker: LANDMARK

2-7 PCIP Max Power: 3KW

3.System Controller

3-1 CPU: Pentium 4

3-2 Hard disk: 80GB

3-3 1st data back-up: External Hard Disk Drive

3-4 2nd data back-up: CD-RW

3-5 Operation Monitor: 15" LCD

3-6 Signal Tower: Pole type

4.Process Gas Line

4-1 MFC Maker: STEC

4-2 GAS Box Tupe: IGS Type

4-3 Number of gas Line: 

   GAS #1: O2 20slm

   GAS #2: N2 3slm

   GAS #4: H2N2 5slm

4-4 Purity: 10RA

4-5 MFC Signal: Digital(UFC8161)

4-6 Toxic Gas Handle Valve Install: Yes

4-7 Gas Line Polishing: Electrical Polished

4-8 Regulator: PARKER

4-9 Air Operated Valve: Fujikin

4-10 Filter: Millipore

4-11 Pressure Transducer: Tem Tech

5.Vacuum 

5-1 Pressure Control: Throttle Valve

5-3 Vac Line Out Let Port: 100

6.Utility

6-1 Main Power: 3 208VAC 60HZ 288A

6-2 UPS Power: 1 208VAC 60HZ 63A

6-3 Power Vaccine: 1sec pffd

6-4 Electric&signal cable Length: 20M

6-5 UPS Battery: YES

6-6 Circuit Break Type: ELCB Type

6-7 Water Manifold valve: Swg & Shut off v/v


Damage/Missing parts list

Missing- PM1 PMC controller Qty 1

Damage- PM2 gas5 MFC regulator Qty 1

Damage-PM2 gas6 MFC regulator Qty 1

Missing- PM1 EMO switch Qty 1

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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