Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Mattson Technology, Inc. Aspen III ICP

Asset ID: 207411

Print spec sheet

Mattson Technology, Inc.

Aspen III ICP

Stripper/Asher

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2004

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 8/27/2021

WET - 11-3MTSN_ASPICP_STR_02CU - STRIP



Tool config is based on original PO, please verify tool details at tool inspection


General Information

Process chamber : 2

FI: 1

Transfer module: Upper/lower arm 1

AC power box: Arm1/Arm2 2

Transfer module: Arm1/Arm2 1

ATM Robot: 1

VTM Robot: 1

ATM/VTM ROBOT control: PMAC

MFC Gas 1 (O2-10SLM): 2

MFC Gas 2 (CF4- 50 SCCM): 2

MFC Gas 3 (H2/N2-1SLM): 2

MFC Gas 4 (N2-2SLM): 2

APC(valve + control): KALREZ 8085 2

Gauge: MYKROLIS 2

EPD Controller: EP200Mmd 8

Heater Module: WATLOW 2

Heater Module: Eurotherm 2

RF gen. model: RFG 3001+13.56 MHz+3000 W 8

Match: 8

LCD Monitor: 2

Electric&signal cable Length: estimated around 8M 


Specification

1.Main Body

1-1 Load Port Brooks

1-2 Number of load port 4 Load ports

2.Chamber

2-1 Bottom Temp Control ±5℃(in wafer)

2-2 End Point Detector Yes

2-3 Chamber Heating Control Type WATLOW

2-4 Temp Control Range 80℃∼300℃

2-5 Pre-Heat Function NO

2-6 RF gen. model AE

2-7RF gen. model 3KW

3.System Controller

3-1 CPU Pentium 4

3-2 Hard disk 60GB+80GB

3-3 Operation Monitor 15" LCD

3-4 Signal Tower Pole type

4.Process Gas Line

4-1 MFC Maker Aera

4-2 GAS Box Tupe IGS Type

4-3 Number of gas Line

   GAS #1 O2-10SLM

   GAS #2 CF4- 50 SCCM

   GAS #3 H2/N2-1SLM

   GAS #4 N2-2SLM

4-4 GAS box valve NUPRO

4-5 GAS box regulator TESCOM

4-6 GAS box pressure display SWAGELOK

4-7 GAS box filter MYKROLIS

5.Vacuum 

5-1 Pressure Control KALREZ 8085


Damage/Missing parts list

Front monitor is damaged

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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