Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Date of Manufacture: 2006
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process: SWC
Tool config is based on original PO, please verify tool details at tool inspection
Chamber R1 & Chamber R2 & Chamber L1 & Chamber L2
Med. 1:49%HF
Med. 2: Poly
DI Dispenser
N2 Dispenser: Bronkhost Mass Flow Controller
Chuck N2 MFC
Chuck: Advanced Pin Chuck
Medium1
Chemical: HF(49%)
Temperature control: B&R controller, Inlineheater Lufran 6KW*2
Circulation pump: :evitronix BPS-3
Filter: Entegris
Concentration Monitor: NA
Medium2
Chemical: Poly
Temperature control: B&R controller, Inlineheater Lufran 6KW
Circulation pump: Levitronix BPS-3
Filter: Entegris
Concentration Monitor: Horiba CS-100 series
Damage/Missing parts list
Please inspect tool to reconfirm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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