Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Dainippon Screen Mfg. Co. (DNS)
Date of Manufacture: JAN 2016
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 6/30/2023
Missing or damaged parts: Fab15 confirmed there are no missing or damaged parts.
| OEM | DNS | ||
| Tool Model | SU3200 | ||
| Process | CHX | ||
| Software Version (include revision #) | V2.642STD00 | ||
| System Power Rating | 208AC 3-phase | ||
| Loading Configuration | 4 load ports | ||
| Vendor Chm Model | Chemicals / Gases Used (not to use Micron Proprietary names) | ||||
| Chm/Unit Position 2 | MPC2__________________ | DHF(1:30,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ HotPlate | |||
| Chm/Unit Position 3 | MPC3__________________ | DHF(1:30,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ HotPlate | |||
| Chm/Unit Position 4 | MPC4__________________ | DHF(1:30,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ HotPlate | |||
| Chm/Unit Position 5 | MPC5__________________ | DHF(1:30,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ HotPlate | |||
| Chm/Unit Position 6 | MPC6__________________ | DHF(1:30,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ HotPlate | |||
| Chm/Unit Position 7 | MPC7__________________ | DHF(1:10,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ____________________ | |||
| Chm/Unit Position 8 | MPC8__________________ | DHF(1:10,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ____________________ | |||
| Chm/Unit Position 9 | MPC9__________________ | DHF(1:10,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ____________________ | |||
| Chm/Unit Position 10 | MPC10__________________ | DHF(1:10,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ____________________ | |||
| Chm/Unit Position 11 | MPC11__________________ | DHF(1:10,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ____________________ | |||
| Chm/Unit Position 12 | MPC12__________________ | DHF(1:10,1:100)/APM(SC1)/CO2Water/HDIW/IPA/PK-HAZ____________________ | |||
| Chm/Unit Position 13 | _SC1___________________ | _CC1;DHF=1：100（HF：DIW）__________________ | |||
| Chm/Unit Position 14 | _SC2___________________ | _CC19;e-flow_________________________________ | |||
| Chm/Unit Position 15 | _SC3___________________ | _DDI;NH4OH/H2O2__________________________________ | |||
| Chm/Unit Position 16 | _EC1___________________ | _CC2;DHF=1：10 （HF：DIW）__________________ | |||
| Chm/Unit Position 17 | _EC2___________________ | _CC3;DHF=1：10 （HF：DIW）__________________ | |||
| Chm/Unit Position 18 | _EC3___________________ | _CC4;CHX1 = PK-HAZ__________________________ | |||
| Chm/Unit Position 19 | _EC4___________________ | _CC5;CHX2 = PK-HAZ__________________________ | |||
| Chm/Unit Position 20 | _EC5___________________ | _CC6;IPA1____________________________________ | |||
| Chm/Unit Position 21 | _EC6___________________ | _CC7;IPA2____________________________________ | |||
| Chm/Unit Position 22 | _EC7___________________ | _CC20;H-DIW_________________________________ | |||
| Chm/Unit Position 23 | _EC8___________________ | _Exhaust switching box×4set_＿＿＿＿＿＿＿＿＿＿ | |||
| Chm/Unit Position 24 | _EC9___________________ | _CC3;HF(49%)_______________ | |||
| Section 5. N2 Load Port Configuration | |||
| N2 Load Port Exists | N2 Load Port Vendor | ||
| Yes | SCREEN | ※Port1,2 Only | |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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