Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Hitachi (Semiconductor) CG4000

Asset ID: 204411

Print spec sheet

Hitachi (Semiconductor)

CG4000

SEM

Metrology Equipment

Equipment details:

Date of Manufacture: TBC

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

No photos provided by Fab15 since tool has been de-installed and is stored in an off-site warehouse.


Vendor:HITACHI

S/N:3106-02


VID:VID753

SW Version:33.1D

Resolution:1.8nm

throughput:36wafer/h

MAM Time:3.4sec

Stage Landing Accuracy:±1μm


Missing or damaged parts: Fab15 confirmed there were no missing or damaged parts.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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