View full inventory list

Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Applied Materials (AMAT) Endura II Aluminum Interconnect

Asset ID: 207036

Print spec sheet

Applied Materials (AMAT)

Endura II Aluminum Interconnect

PVD (Physical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 2/26/2021

PVD - 15-3AMAT_END_REFLOW2 - ENDURA2 -


A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.

Other missing or damaged parts: Not reported.


[Chamber 1]

For Ti/TiN PVD chamber,SIP

DCPS;Master,PINNACLE,AE,for PVD

    Slave,PINNACLE,AE,for PVD

RFPS;GHW-12,ENI,for Bias     

PUMP/CRYO,OBIS,HELIX

SLT ESC type stage

Ar;50/20sccm, N2;200sccm


[Chamber 2]

For Al-Cu PVD chamber,ALPS

DCPS;Master,OPTIMA DCG-200,ENI,for PVD

    Slave,OPTIMA DCG-200,ENI,for PVD

PUMP/CRYO,OBIS,HELIX

SLT ESC type stage

Ar;100/20sccm


[Chamber 3]

For Al-Cu PVD chamber

DCPS;Master,OPTIMA DCG-200,ENI,for PVD

    Slave,OPTIMA DCG-200,ENI,for PVD

PUMP/CRYO,OBIS,HELIX

HT ESC type stage

Ar;200/20sccm


[Chamber 4]

For Al-Cu PVD chamber

DCPS;Master,OPTIMA DCG-200,ENI,for PVD

    Slave,OPTIMA DCG-200,ENI,for PVD

PUMP/CRYO,OBIS,HELIX

HT ESC type stage

Ar;200/20sccm


[Chamber 5]

For Ti/TiN PVD chamber,SIP

DCPS;Master,PINNACLE,AE,for PVD

    Slave,PINNACLE,AE,for PVD

RFPS;GHW-12,ENI,for Bias     

PUMP/CRYO,OBIS,HELIX

SLT ESC type stage

Ar;50/20sccm, N2;200sccm


[Chamber C]

For Pre-CLN chamber,PCXT

RFPS;CDX-2000,13.56/2MHz,COMDEL,for BIAS/SLA

PUMP/TMP MAG1300,LEYBOLD.

Ar;200/20sccm


[Chamber D]

For TiN PVD chamber

DCPS;OPTIMA DCG-200,ENI,for PVD

PUMP/CRYO,OBIS,HELIX

A101 type stage

Ar/N2;150/200sccm


[Chamber E]

For Degas,Plate heater

PUMP/CRYO,HELIX ON-BOARD IS

Ar,press. Controlled


[Chamber F]

For Degas,Plate heater

PUMP/CRYO,HELIX ON-BOARD IS

Ar,press. Controlled

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

Applied Materials, Endura II Aluminum Interconnect

01 / 30

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

View more

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.