Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

LAM Research 2300e5 KIYO EX

Asset ID: 210805

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LAM Research

2300e5 KIYO EX

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 2/17/2023

Missing or damaged parts: Fab15 confirmed there are no missing or damaged parts.


OEM  LAM
Tool Model  Kiyo EX e5
Process  Poly
Software Version (include revision #) 1.8.4_SP8-HF5
System Power Rating  200 AC 3-Phase
Loading Configuration  4 load ports
   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  Kiyo EXSiCl4,BCl3,Cl2,HBr,CF4,O2,SF6,He,C4F6,CH2F2,Ar,NF3,N2,SO2
Chm/Unit Position   2  Kiyo EXSiCl4,BCl3,Cl2,HBr,CF4,O2,SF6,He,C4F6,CH2F2,Ar,NF3,N2,SO2
Chm/Unit Position   3  Kiyo EXSiCl4,BCl3,Cl2,HBr,CF4,O2,SF6,He,C4F6,CH2F2,Ar,NF3,N2,SO2
Chm/Unit Position   4  Kiyo EXSiCl4,BCl3,Cl2,HBr,CF4,O2,SF6,He,C4F6,CH2F2,Ar,NF3,N2,SO2
Chm/Unit Position   5  Kiyo EXSiCl4,BCl3,Cl2,HBr,CF4,O2,SF6,He,C4F6,CH2F2,Ar,NF3,N2,SO2


N2 Load Port Exists: YES.

N2 Load Port Vendor: 2nd Vender JUSTEM.


For more details, please see configuration.

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