Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Applied Materials (AMAT) Reflexion LK - Poly/STI

Asset ID: 206025

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Applied Materials (AMAT)

Reflexion LK - Poly/STI


CMP Equipment

Equipment details:

Date of Manufacture: 2004

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available

Section 1. Tool General Information 
Micron MISTI/LID #  CMP7019
Vendor Tool Serial #  405313
Month / Year of Tool Move In  6/1/2004
Tool Availability Date  1/27/2021
Tool Current Status De-installed
Tool working condition  Not working with missing parts
Tool Location  Warehouse
Any modification/conversion/refrofit was perform to the tool?  
Section 2. Move-out constraint 
Any layout/move-out path constraint No
If there is any move-out path constraint, please inform site reuse planning immediately and propose tool ID swap.   
Reuse tool configuration template needs to be populated based on the correct tool ID proposed for tool transfer.
Section 3. Tool Specific Information 
Tool Model  Reflexion LK
Process  STI
Software Version (include revision #) Ip3B4.8_52
System Power Rating  208v 3 Ø 60Hz
Loading Configuration  3 load ports (TDK)
 System Configuration   
 Tool: AMAT Reflexion LK   
 Process Unit: Polisher  Model: Reflexion LK
 Controller: eServer   
 MFC/Pressure Unit:    
 Drive Mechanisms: Mechanical / Pneumatic  
 FOUP Opener: Pneumatic   
 Gas System: CDA / HPN2   
 Exhaust System: Acid / Solvent  
 *All OEM cable connecting between FAB to SubFab are require to be list out (Include length in mm)
1Polisher - 3 platens   
2Polisher - 4 carriers (5-Zone Contour)  
3Polisher - 8 UPAs (G4+)   
4Polisher - P1 slurry controllers: 20-200ml/min (x2); 50-500ml/min (x2) 
5Polisher - P2 slurry controllers: 20-200ml/min (x3)  
6Polisher - P3 slurry controllers: 20-200ml/min (x2); 50-500ml/min (x1) 
7Cleaner - Running Beam   
8Cleaner - Input, Buffer, Megasonics, Brush Box 1, Brush Box 2, Dryer (Desica - Marangoni)

List of the missing and defective items:

FI Robot Controller

iAPC Server

Head Driver Box

Polisher DC Power Supply Assembly (AMAT; 0010-63313)

Cross Rotation Driver (AMAT; 1080-00262)

FI Robot

FI Fan Assembly

Platen Motor and Gearbox (7:1)

Cleaner FFU

  • eServer HDD
  • FI non-integrated computer
  • Solenoid assy from pneumatics assy (0190-14775)

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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