Macquarie Equipment Trading on behalf of Micron Memory Taiwan Co., Ltd. (F16)

ASM International Eagle XP

Asset ID: 185473

Print spec sheet

ASM International

Eagle XP

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: 2/26/2021

Tool config is based on original PO, please verify tool details at tool inspection


Overall Tool Condition

Any Field Modifications: No

All Cables present: Yes

Any Corrosion visible on modules: No

Any Missing / Damaged Parts: No

Shipping Brackets Included: No


Wafer Handler: Yes

Handler Type ATM, vacuum

# of Cassette / FOUP Loaders: 3 FOUP loaders

Robot Type: Signal arm

End-Effecter Type: Self-aligner

Pre-Aligner: No

Mini-Environment: Yes


System Software

System SW (OS) version: 1.14a4

SEMI Std Options: E84


Communication Interface

GEM / SECS: GEM

HSMS: yes


Supporting Equipment

Power Supply: AC 208V 3 phases, 50/60 Hz

AC Dist Box: Yes

Ext Transformer: No

UPS: Yes

Heat Exchanger / Chiller: No

Backing Pump(s): No


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.