Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
Date of Manufacture: 1995
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Hsinchu 300, Taiwan
Available date: Currently Available
Inspect to confirm configuration and condition.
The system is not on-line.
Install Type is Stand-Alone.
The equipment is suitable for processes of oxide, SiN, silicon, metal etch.
The gas used contains O2, N2, CHF3, SF6.
The pump is Lyebold (Model: D25BCS) and will be move out with the equipment.
The chiller is NESLAB (model: CFT75) that the current status is damaged and it will be move out with the equipment.
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