Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.

Ebara FREX300S2

Asset ID: 13127

Print spec sheet

Ebara

FREX300S2

Multi-Process CMP

CMP Equipment

Equipment details:

Date of Manufacture: Jul 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Icheon-si, Gyeonggi-do, Korea, Republic of

Available date: TBD

1.  Main System: F-REX300S2

I.   Polishing Unit

  Turn Table x4, Top Ring x4(GX 8-Area), Scan Dresser x4, Atomizer x4,

  Liner Transportor x2, Turn Over x2, STP x1, System Controller,

  Slurry Scan Nozzle x4, Wafer Slip-Out Sensor x4, Operation Panel x2

II.  Cleaner Unit

  1st: R/R w/Megasonic Jet, 2nd:R/R, 3rd:R/R, 4th:IPA/SRD

III.  EFEM Unit

  Dry Robot x1, Loadport x4, Operation Panel x2, ITM NOVA Ready at Left Side

IV.   M14 Common Spec & FA Spec Requirement

V.  M14 Hardware Requirement & Improvement Items (Slurry Nozzle Motor Type, Auto Calibration)

2.  Standard Options

I.   Spare GX Carrier

II.  Anti-Static Material for Wafer Exposed Surface

III. Eddy Current End Point Monitor (R-ECM1D) for 2 Table-B&D

IV. ME-30 x2 for S-OPM & TCM EPD Controller

V. Malema Slurry Flow Controller for 3 Line/Table

VI.  Light Curtain for EFEM

VII.  Equipment Monitor Function (Camera)

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.