Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Nissin Electric Co., Ltd. EXCEED 3000AH

Asset ID: 209685

Print spec sheet

Nissin Electric Co., Ltd.

EXCEED 3000AH

Mid Current Implanter

Ion Implanters

Equipment details:

Date of Manufacture: Aug. 2006

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 12/1/2021

IMPLANT 15-3NSIN_EX30_MC NISSIN EX30 MC

OEM  NISSIN ION EQUIPMENT
Tool Model  EXCEED3000AH
Process  IMPLANT
Software Version (include revision #) Ver2.7.6.15R6
System Power Rating  400VAC 3-Phase
Loading Configuration  1 Process Chambers


   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  __Process Chambers______BF3/PH3/AsH3________________
ClassificationIMMCK38D00
SystemModelEXCEED3000AH G2
VendorVendorNISSIN ION EQUIPMENT
ProcessProcessMedium current ion implanter
MMMMIVer2.7.6.15R6
IC IC6EF2BG
BC BB30I156R
SC VER4.74M
EC Ver1.17
MaterialAr/Facility
 BF3/SDS
 PH3/SDS
 AsH3/SDS
 InF3/Solid
I/SI/S ChamberEX3000 Type
 Source HeadBEAR
 VapolizerNo use
 Ext. ElectrodeBEAR compatible
 Low Beam ApartureOne hole
AMUMass SlitEX3000 Type
 SAM pole peaceEX3000 Type
 SAM pole linerNo use
 SAM Dump TileThickness
ACCACC TubeEX3000-Carbon
 ACC Sup.EX3000 Type
 ACC_PSSL220P2000X2696Spellman
A/L cylinderMechanical lockEX2300AH/3000AH Type
A/L1 Side
CLSF160-DCG2192G-143 
A/L2 Side 
CLSF160-DCG2191G-143
A/L Sub cylinderSub cylinderEX2300AH/3000AH Type
CQ2B63-DCG2549G-XC10
BSMBSM ChamberEX3000 Type
Scan drive unitScan drive unitEX2300AH/3000AH Type
PFGPFGUse
 Xe gasExternal supply
ESCESCSilicon rubber
 Adsorption voltage1000V
V-lenzV-lenzNo use
 Load PortTAS300 TYPE E4
(TDK)
TransferATM RobotI-hand 3000AH Type
NS510S-A003
 ATM Robot cntEX3000AH Type
C75F-A002
 PLATEN MOTION CONTROLLER POWER UX-CM810PERCR-VD01-E100compatibilityUX-CM810P
 V-ArmEX3000AH Type
 A/L roughing valveEX3000AH Type
 A/L vent filterEX3000AH Type
PumpDP1AA10N
 DP2ACP28G
 DP3AA200N
 DP4No use
 DP5AA10N
 TP1TMP-1003MC
 TP2TMP-1003MC
 TP3TMP-1003MC
 CP1P-126CL
 CP2P-126CL
 CP3P-126CL
 CP4P-086CL
OTHERBack ShutterNo use

Missing or damaged parts: FAb15 confirmed there were no missing or damaged parts.


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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