Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Canon FPA-5500 iZa

Asset ID: 210005

Print spec sheet

Canon

FPA-5500 iZa

i-Line Wide-Field Stepper

Lithography Equipment

Equipment details:

Date of Manufacture: 2005-07

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 2/9/2022

Lens performance data run on Oct 6, 2021 Available: Please ask your sales person.

Photos Available: Please ask your sales person.


Last Operations scheduled on February 9, 2022.

Equipment removal due is by March 11, 2022.

Buyer is responsible for arranging de-installation for tool in clean room.

Missing or damaged parts: Fab15 confirmed there were no missing or damaged parts.


CONFIGURATION:

OEM  CANON
Tool Model  FPA-5500iZa
Process  Photo i-Line
Software Version (include revision #) V72.05A.14
System Power Rating  200 AC 3-Phase for System
Loading Configuration  1 FOUP load part and 2 SMIF indexer
Tool:   
Process Unit: Lamp house, Illumination system, Reticle stage, Projection lens, Wafer stageModel: N/A
Controller: Main Console   
MFC/Pressure Unit: Control Rack  
Drive Mechanisms: Wafer feeder and Reticle Handler 
FOUP Opener: Open cassette elevator  
Gas System: CDA   
Exhuast System: heat Exhaust   
Safety:
Interlock
EMO
Lock out/Tag out
Other: 
PPC 
PC Remote Consoles(need application) 


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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