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Rudolph Technologies, Inc. Matrix S-300


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Asset ID: 210188

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Rudolph Technologies, Inc.

Matrix S-300


Metrology Equipment

Equipment details:

Date of Manufacture: 2003-01-11

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Singapore, Singapore

Available date: Currently Available

Inspect to confirm configuration and condition.


General System Info

Date of Audit: 14-Feb-22

Serial Number: 1-05-VSD-1341-BR-06

Original Ship Date: 2003

Wafer Size (inches): 12

Loading Configuration: FOUP

Operating System Software Version: OS2

Rudolph Software Version: 7.51



Date of Last PM: 2018

CE Mark Certified? No

Electrical Requirements: 200/220V Single phase

OEM Audit Available? No

Can Produce Wafers AS IS? No

Any Known Field Modifications? No

All Cables Present? No

Shipping Brackets Installed upon Deinstall: No

GEM/SECS Interface: Yes

3.5” Floppy Drive: Yes

Hard Disk Size: unknown


System Configuration

Matrix Series: S-300


Key Common Options

Clean Room Manuals: No

Standard Manuals: No

CD-ROM Manuals: No

Calibration Standards: No


Matrix Series

Loading Configuration: Dual FOUP

Lasers: 633nm HeNe / 458nm Ar / 780/905nm Solid State

Operating Wavelengths:

DUV: 190-470nm

OMA: 470-905nm

Pattern Recognition Hardware: No



Spot Optic Sizes (um): 100,30,15


Damage/Missing parts list

Please inspect tool to reconfirm

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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