Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Edwards iH80

Asset ID: 209431

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Edwards

iH80

Dry Pump

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Qty 10- Not overhaul (pump controller is not included)


AreaAsset descriptionoverhaulFixed Asset No.S/NLocationFAB
FS80-326N3A52BE05190046272608A6.5-12FAB B
FS80-326N3A52BE05130037910550A21.5-9.5FAB B
FS80-331N3A52BE0ADSADS6020037911991A22.5-2.5FAB B
FS80-326N3A52BE05020037911098A22.5-2.5FAB B
FSIH80N3A52BE05030037898592FABB_F1FABB_F1
FSIH80N3A52BE05090037909107FABB_F1FABB_F1
FSIH80N3A52BE05120037910555FABB_F1FABB_F1
FSIH80N3A52BE05140037911109FABB_F1FABB_F1
FSIH80N3A52BE05050037911560FABB_F1FABB_F1
FSIH80N3DJY4020F100109326696FABB_F1FABB_F1



Technical data :

60 Hz Peak speed (m3 /h) : 103

60 Hz Ultimate vacuum (torr) : 7.5 x 10-3

50 Hz Peak speed (m3 /h) : 86

50 Hz Ultimate pressure (torr) : 2.3 x 10-2

Typical shaft seal nitrogen flow (slm) : 4

Cooling typical water flow at 15psi drop: 2 l/mn

Oil capacity : 0.7 l

Inlet connection : ISO63

Outlet connection : NW40

Noise Level : <69 dB(A)

Weight : 240 kg

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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