Macquarie Semiconductor and Technology on behalf of Qorvo US, Inc.
Date of Manufacture:
Currently Configured for: N/A
Current Equipment Status: Available
Location of Equipment: Hillsboro, United States
Available date: Currently Available
Configuration: Audit to verify.
Pump has not been refurbished and has not been skidded or crated.
Technical data :
Nominal flow-rate (50/60 Hz) : 1136/1336 l/mn
Rotation speed : 3000/3600 rpm
Ultim. Pressure without nitrogen supply (50 Hz) maximale : 3.10-2 torr
Ultim. Pressure without nitrogen supply (60 Hz) maximale : 6.7 x 10-3 torr
Max. cont. inlet pressure : 50/38 mbar/torr
Max. exhaust pressure : 1200/900 mbar/torr
Motor power (total) : 1,5 kW
N2 flow rate range : 0 to 90000 sccm
Water flow : 30 to 100 l/h
Weight std version : 240/529 kg/lb
Weight mod. Version : 210/463 kg/lb
Ø Inlet/Exhaust port : 40/40 DN
Average noise level : < 70 dBA
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